On-Wafer Temperature Monitoring Sensor for Condition Monitoring of Repaired Electrostatic Chuck

Kim, Jaehwan; Koo, Yoonsung; Song, Wansoo; Hong, Sang Jeen

doi:10.3390/electronics11060880

Cited by 9 publications

(4 citation statements)

References 28 publications

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“…187) The uniformity of the substrate temperature was controlled using a multizone heating system. [188][189][190][191] The temperature of the electrostatic chuck, used as a wafer susceptor, was monitored using a wireless-type on-wafer temperature monitoring system. 189) To understand the temperature results, the heat transfer characteristics of the ceramic puck for the electrostatic chuck, and the effects of different types of heating zones, such as multi-zone/singlezone heaters, 190) and the temperature uniformity of the ceramic puck 191,192) were investigated.…”

Section: Sa0803-11mentioning

confidence: 99%

Science-based, data-driven developments in plasma processing for material synthesis and device-integration technologies

Kambara

Kawaguchi

Lee

et al. 2022

Jpn. J. Appl. Phys.

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Low-temperature plasma processing technologies is essential for material synthesis, device fabrication, and surface treatment. The development of plasma-related products and services requires an understanding of the multiscale complex behaviors of plasma and the hierarchical integration of plasma generation, energy and mass transports through sheath region, surface reactions, and other processes. The importance of science-based and data-driven approaches to controlling systems is argued. The state-of-the-art of deep learning, machine learning, and artificial intelligence in low-temperature plasma science and technology is reviewed. In this review, the requirements and challenges for plasma parameter prediction and processing recipe discovery are asserted by researchers in the fields of material science and plasma processing. It also outlined a science-based, data-driven approach for development of virtual metrology in plasma processes.

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Section: Sa0803-11mentioning

confidence: 99%

Science-based, data-driven developments in plasma processing for material synthesis and device-integration technologies

Kambara

Kawaguchi

Lee

et al. 2022

Jpn. J. Appl. Phys.

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show abstract

“…Besides semiconductor manufacturing, this system can be applied to a variety of areas that use sensor data. Considering that temperature variation of the electrostatic chuck (ESC) has a direct impact on the characteristics of the etching process, a wireless on-wafer temperature monitoring (OTMS) system consisting of 65 temperature measurement units was developed in Reference [2] to monitor the operating condition of the ESC. In this study, by comparing the data collected before and after the repair of the ESC, it has been confirmed that the abnormal state of the ESC can be correctly detected using the temperature distribution diagram.…”

Section: The Present Issuementioning

confidence: 99%

Advances in Machine Condition Monitoring and Fault Diagnosis

2022

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In the past few decades, with the great progress made in the field of computer technology, non-destructive testing, signal and image processing, and artificial intelligence, machine condition monitoring and fault diagnosis technology have also achieved great technological progress and played an active and important role in various industries to ensure the efficient and reliable operation of machines, lower the operation and maintenance costs, and improve the reliability and availability of large critical equipment [...]

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“…It is predicted that the global sensors market size will grow from USD 204.80 billion in 2022 to around USD 508.64 billion by 2032 [ 4 ]. Among different types of sensors, a temperature sensor detects and measures coldness and heat and then converts its measurement into an electrical signal, which can facilitate automatic process control [ 5 ], quality inspection [ 6 ], and hazard management [ 7 ].…”

Section: Introductionmentioning

confidence: 99%

A Circuit-Level Solution for Secure Temperature Sensor

Kajol

Monjur

2023

Sensors

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Temperature sensors play an important role in modern monitoring and control applications. When more and more sensors are integrated into internet-connected systems, the integrity and security of sensors become a concern and cannot be ignored anymore. As sensors are typically low-end devices, there is no built-in defense mechanism in sensors. It is common that system-level defense provides protection against security threats on sensors. Unfortunately, high-level countermeasures do not differentiate the root of cause and treat all anomalies with system-level recovery processes, resulting in high-cost overhead on delay and power consumption. In this work, we propose a secure architecture for temperature sensors with a transducer and a signal conditioning unit. The proposed architecture estimates the sensor data with statistical analysis and generates a residual signal for anomaly detection at the signal conditioning unit. Moreover, complementary current–temperature characteristics are exploited to generate a constant current reference for attack detection at the transducer level. Anomaly detection at the signal conditioning unit and attack detection at the transducer unit make the temperature sensor attack resilient to intentional and unintentional attacks. Simulation results show that our sensor is capable of detecting an under-powering attack and analog Trojan from a significant signal vibration in the constant current reference. Furthermore, the anomaly detection unit detects anomalies at the signal conditioning level from the generated residual signal. The proposed detection system is resilient against any intentional and unintentional attacks, with a detection rate of 97.73%.

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On-Wafer Temperature Monitoring Sensor for Condition Monitoring of Repaired Electrostatic Chuck

Cited by 9 publications

References 28 publications

Science-based, data-driven developments in plasma processing for material synthesis and device-integration technologies

Science-based, data-driven developments in plasma processing for material synthesis and device-integration technologies

Advances in Machine Condition Monitoring and Fault Diagnosis

A Circuit-Level Solution for Secure Temperature Sensor

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