One-dimensional hybrid modeling and simulation of electron cyclotron resonance discharge

Choi, Nam-Sup; Koh, Wook-Hee; Yoon, N. S.; Park, Hyoung-Bin; Choi, Duk In

doi:10.1109/27.467982

Cited by 5 publications

(2 citation statements)

References 18 publications

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“…There have been a number of previous studies, both experimental [2][3][4][5][6][7][8][9] and theoretical [10][11][12][13][14][15], of the ion velocity distribution in processing plasmas. Matsuoka and Ono [2] studied the ion distribution functions at the substrate in an argon ECR plasma over a range of parameters.…”

Section: Introductionmentioning

confidence: 99%

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Ion distribution functions in an Ar-Cl ECR discharge

Joyce

Lampe

Fernsler

et al. 2000

Plasma Sources Sci. Technol.

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In processing plasmas, the ion distribution functions are generally non-Maxwellian and spatially varying. We have used the NRL axisymmetric particle simulation code QUASI-rz to calculate ion distribution functions at various positions in the plasma, for an ECR discharge in Ar/Cl gas mixture. We show that the distribution functions are determined by an interplay of several processes: ion acceleration due to the diverging magnetic field, or to the pre-sheath electric field, charge-exchange collisions, and Coulomb collisions between ions. Omitting any of these processes from a model radically alters the conclusions.

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Section: Introductionmentioning

confidence: 99%

“…Subsequent studies by other authors used a variety of simulation techniques, but in all cases omitted ion-ion collisions. Choi et al [11] used a one-dimensional model with particle ions and massless fluid electrons. Liu et al [12] and Wu et al [13] used twodimensional models with particle ions and fluid electrons.…”

Section: Introductionmentioning

confidence: 99%

Ion distribution functions in an Ar-Cl ECR discharge

Joyce

Lampe

Fernsler

et al. 2000

Plasma Sources Sci. Technol.

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Monte Carlo simulations of argon ion transport in the downstream region of electron cyclotron resonance plasmas

Zhong

et al. 1998

Journal of Applied Physics

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A Monte Carlo method to simulate the plasma characteristics of an electron cyclotron resonance (ECR) microwave discharge system is presented. We use the method to predict the ion behavior in the downstream region of an ECR argon plasma. The pressure and space dependences of the plasma potential, the effects of gas pressure on the ion velocity and angle distribution and the evolution of distributions are examined and discussed in detail. Our results of the simulation show that the ion parallel velocity distribution appears to be bimodal and is strongly dependent on the gas pressure, whereas the ion perpendicular velocity distribution is mainly determined by the applied magnetic field, and the ion beam tends to be parallel to the magnetic field.

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Numerical study of argon ions transported across the sheath in electron cyclotron resonance discharges

Zhong

Sun

et al. 1999

Journal of Applied Physics

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The transport of argon ions through the sheath as well as through the neutral region in electron cyclotron resonance discharges in argon gas is studied by means of Monte Carlo simulation, with the emphasis on the sheath potential and the characteristics of argon ions in the sheath. The evolution of the energy, velocity, and angle distributions of the ions in the sheath and the dependence of the distributions on gas pressure and substrate bias are investigated primarily concerned with collisional sheath. It is found that the effect of the pressure on the ion behavior in the sheath is not the same as in the neutral region, however, the substrate bias greatly influences the ion behavior mainly due to ion-neutral elastic collisions within the sheath. Our results also show that the ion motion in crossing the sheath tends to be parallel to the applied magnetic field, and an ion flux with good directionality can be expected by imposing on a negative voltage substrate.

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One-dimensional hybrid modeling and simulation of electron cyclotron resonance discharge

Cited by 5 publications

References 18 publications

Ion distribution functions in an Ar-Cl ECR discharge

Ion distribution functions in an Ar-Cl ECR discharge

Monte Carlo simulations of argon ion transport in the downstream region of electron cyclotron resonance plasmas

Numerical study of argon ions transported across the sheath in electron cyclotron resonance discharges

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