One-step microfabrication of fused silica by laser ablation of an organic solution

Wang, J.; Niino, Hiroyuki; Yabe, Akira

doi:10.1007/s003390050863

Cited by 222 publications

(124 citation statements)

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“…[13][14] Laserinduced backside wet etching (LIBWE) has two types: the excimer laser exposure projection-mask type that has high size precision, and the laser scanning irradiation type where the prototypes can be made easily (Fig. 11).…”

Section: High-quality Microfabrication Of Hard-brittle Materialsmentioning

confidence: 99%

“…The processing depth increases in proportion to the cumulative pulse number by conducting concurrent irradiation. [13] Compared to other methods, the photoresist protection layer formation and its removal, which were necessary in the conventional lithography process, as well as vacuum devices are not necessary, and the pretreatment and post-treatment are greatly simplified.…”

Section: High-quality Microfabrication Of Hard-brittle Materialsmentioning

confidence: 99%

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Green photonics for laser-based manufacturing

Niino¹

2015

Synthesiology English edition

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products, by providing novel members, parts, and products through the realization of high-precision, high-quality processing of difficult-to-process materials. By introducing the laser technology to the manufacturing process, we hope to achieve greening of the product and manufacturing processes.The greening of the manufacturing process means the promotion of energy saving, material saving, and waste reduction throughout the whole process of new manufacturing methods compared to the conventional methods. Since the energy saving measures are thoroughly implemented in the Japanese factories, expectation is high for altering the process content such as process saving and reduction in the number of parts rather than simple renewal of a process. Greening of the products means that the production volume of energy-saving members and parts that are desired by the market are stabilized and used in products. Although the effect may be small for a single part, the ripple effect on society as a whole may be large if the amount used throughout the market is enormous. Particularly, if such parts are used as main parts of durable consumer goods, the energy-saving effect will be enhanced.For the R&D of material processing technology using lasers in Japan, budgets are allotted heavily by the New Energy and Industrial Technology Development Organization (NEDO) of the Ministry of Economy, Trade and Industry (METI), and the Japan Science and Technology Agency (JST) of the Ministry of Education, Culture, Sports, Science and Technology (MEXT), for industry-academia collaboration toward industrial application. Overseas, the collaboration IntroductionThe clarification of interaction between photon and matter substances and photon (light) has been an important academic research topic since ancient times, and currently, research is promoted actively as an advanced topic in many countries. Looking at the process of photon absorption by substances, various excitation states are induced in substances (atoms and molecules) through photon absorption, followed by a relaxation process, chemical bond cleavage, and others. In the relaxation process from high-vibrational excitation, a hightemperature state occurs through the so-called photothermal process, and in the chemical bond cleavage from an electron excitation state, the chemical reactions such as dissociation of molecules and recombination of chemical bonds occur through the photochemical process. The main characteristic in practical use is that area-selective localized treatment to a specific area is possible by irradiating the base material with light focused into micro-patterns or micro-spotlights.The main topic of this paper is the processing technology using lasers, and the localized laser treatment technology based on the characteristic photo-excitation process induced by irradiating high-power lasers to various advanced materials including polymers, glass and ceramic, metals, and composites is addressed. The goal is to use the laser excitation processing technology for cost reductio...

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Section: High-quality Microfabrication Of Hard-brittle Materialsmentioning

confidence: 99%

Section: High-quality Microfabrication Of Hard-brittle Materialsmentioning

confidence: 99%

Green photonics for laser-based manufacturing

Niino¹

2015

Synthesiology English edition

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“…Furthermore, hybrid laser ablation methods based on the utilization of absorbing surface-adherent layers or media allow the use of cost-efficient nanosecond laser sources. These methods are known as laser-induced plasma-assisted ablation (LIPAA) [9,10], laser-induced backside wet etching (LIBWE) [11,12], laser etching at a surface adsorbed layer (LESAL) [13,14] and laser-induced backside dry etching (LIBDE) [15]. Recently, nanosecond laser ablation of optical glasses by introducing assisting atmospheric pressure plasmas to the ablation process was investigated.…”

Section: Introductionmentioning

confidence: 99%

Sequential Atmospheric Pressure Plasma-Assisted Laser Ablation of Photovoltaic Cover Glass for Improved Contour Accuracy

et al. 2014

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Abstract:In this paper, we present sequential atmospheric pressure plasma-assisted laser ablation of photovoltaic cover glass. First, glass samples were plasma pre-treated using a hydrogenous plasma process gas in order to accomplish a modification of the near-surface glass network by a chemical reduction and the implantation of hydrogen. As a result, the transmission at a wavelength of 355 nm was reduced by approximately 2% after plasma treatment duration of 60 min. Further, the surface polarity was increased by approximately 78%, indicating an increase of the near-surface index of refraction. Subsequently to the plasma pre-treatment, the samples were laser ablated applying the above-mentioned laser wavelength of a Nd:YAG nanosecond laser. Compared to untreated samples, a significant decrease of the form error by 45% without any mentionable change in the ablation rate was obtained in the case of pre-treated samples. For comparison, the results and findings are discussed with respect to previous work, where the presented plasma-assisted ablation procedure was applied to optical glasses.

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“…Some earlier studies on microchannel fabrication with this method are, for instance, UV light irradiation of photostructurable glass followed by post wet chemical etching, [15][16][17] fs-NIR direct writing of photostructurable glass followed by post wet chemical etching [18][19][20][21] fs-NIR laser irradiation of silica followed by post wet chemical etching, 22 and instant etching during laser irradiation, i.e., laserinduced backside wet etching (LIBWE). [23][24][25] Instead of using wet chemical etching, an effective method has been developed to fabricate 3D homogeneous microchannels by water-assisted fs direct writing inside porous glass followed by postannealing for consolidation recently. 26,27 Microchannels with arbitrary lengths and configurations could be achieved inside glass.…”

Section: Introductionmentioning

confidence: 99%

Investigation on CO2 laser irradiation inducing glass strip peeling for microchannel formation

Wang

2012

Biomicrofluidics

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The study investigates the use of CO 2 laser to induce glass strip peeling off to form microchannels on soda lime gass substrate. The strip peeling exhibits a strong dependence on the energy deposition rate on the glass surface. In spite of the vast difference in the combination of laser power and scanning speed, when the ratio of the two makes the energy deposition rate in the range 3.0-6.0 J/(cm 2 s), the temperature rising inside glass will be above the strain point and reach the softening region of the glass. As a result, glass strip peeling is able to occur and form microchannels with dimensions of 20-40 lm in depth and 200-280 lm in width on the glass surface. Beyond this range, higher energy depsotion rate would lead to surface melting associated with solidification cracks and lower energy deposition rate causes the generation of fragment cracks.

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One-step microfabrication of fused silica by laser ablation of an organic solution

Cited by 222 publications

References 1 publication

Green photonics for laser-based manufacturing

Green photonics for laser-based manufacturing

Sequential Atmospheric Pressure Plasma-Assisted Laser Ablation of Photovoltaic Cover Glass for Improved Contour Accuracy

Investigation on CO2 laser irradiation inducing glass strip peeling for microchannel formation

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