Open-loop control of a MEMS deformable mirror for large-amplitude wavefront control

Stewart, Jason B.; Diouf, Alioune; Zhou, Yuxiang; Bifano, Thomas G.

doi:10.1364/josaa.24.003827

Cited by 66 publications

(60 citation statements)

References 20 publications

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“…We recently implemented a computationally simple and inherently fast open loop control algorithm on a BU 140 actuator DM. Shapes at the limit of achievable mirror spatial frequencies were achieved with less than 15nm RMS error [11]. Others have also implemented open loop AO control with BU/BMC mirrors, demonstrating comparable results [12,13].…”

Section: Wavefront Correction Technologymentioning

confidence: 92%

MEMS deformable mirrors for astronomical adaptive optics

et al. 2010

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Abstract. We report on the development of microelectromechanical (MEMS) deformable mirrors designed for ground and space-based astronomical instruments using adaptive optics. These light-weight, low power deformable mirrors will have an active aperture of up to 25.2mm consisting of thin silicon membrane mirror supported by an array of up to 4096 electrostatic actuators exhibiting no hysteresis and sub-nanometer repeatability. The continuous membrane deformable mirrors, coated with a highly reflective metal film, are capable of up to 4µm of stroke, have a surface finish of <10nm RMS with a fill factor of 99.8%. The segmented device has a range of motion of 1um of piston and 600 arc-seconds of tip/tilt simultaneously and a surface finish of 5nm RMS. Presented in this paper are device characteristics and performance results for these devices. Motivation for high-resolution wavefront correctionMost large ground based telescopes now employ AO as an essential and enabling tool for highresolution imaging. Though recent progress in AO for current and future large telescopes has been technologically exciting, its impact on astronomical science remains modest to date. AO technology is still inadequate to compensate for the larger wavefront errors and shorter atmospheric coherence lengths associated with visible wavelength observation. Its simplest implementation allows only a narrow field of compensation, and more ambitious instrument concepts are limited by the cost, size, and complexity of AO components, especially the DM. A critical assessment of AO technology was funded by the National Science Foundation several years ago, resulting in a 2008 report entitled A Roadmap for the Development of United States Astronomical Adaptive Optics. The roadmap identifies single major goal for wavefront correction: "Development of scalable, cost-effective DM technologies" and recommends a high-priority research investment to achieve this goal: "High stroke, high actuator count [deformable] mirrors to enable correction at high spatial frequencies over narrower fields of view."The coming generation of ELTs, will be the first to be designed with AO at the outset. Since the benefits of AO increase nonlinearly with telescope aperture, a phenomenon sometimes called D 4 scaling, AO will be essential for many ELT science goals [1,2]. Promising AO instruments that will require new DMs include multi-conjugate adaptive optics (MCAO), multi-object adaptive optics (MOAO), and extreme adaptive optics (ExAO) [3]. MCAO employs two or more guide stars to enable tomographic wavefront error sensing, and then two or more deformable mirrors in series to correct those errors. The result is a wider corrected field of view [4]. This technique was recently used to produce the sharpest whole-planet (Jupiter) picture ever taken from the ground [5]. MOAO is an instrument concept that also uses multiple guide stars and multiple deformable mirrors [6]. However in MOAO, many DMs would be used in parallel to apply independent corrections for the turbulence-induce...

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Section: Wavefront Correction Technologymentioning

confidence: 92%

MEMS deformable mirrors for astronomical adaptive optics

et al. 2010

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“…For input pre-shaping, an accurate dynamic model of the system is of paramount importance, if any performance improvement is expected. An open-loop method that predicted control voltages generating prescribed surface shapes on a MEMS deformable mirror was given in [110]. In this work, an analytic elastic model was used for the mirror membrane and an empirical electromechanical model was used for the actuator dynamics.…”

Section: B Open-loop Control With Input Pre-shapingmentioning

confidence: 99%

A Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systems

Ferreira

Aphale

2011

IEEE Trans. Syst., Man, Cybern. C

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Abstract-In the current times, MEMS and NEMS form a major inter-disciplinary area of research involving science, engineering and technology. A lot of work has been reported in the area of modeling and control of these devices, with the aim of better understanding their behavior and improving their performance. This work presents a review of the emerging advances in the modeling and control of these micro-and nanoscale devices and converges on the exciting research in onchip control, with a mechatronics and controls perspective and concludes by projecting future trends.

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“…At least three different efforts have worked towards detailed modeling of the face sheet motion and how to control that surface with high precision. [15][16][17][18][19] However, our own work has shown that the non-linearity due to the face sheet is low enough that GPI does not require an advanced algorithm to determine actuator voltages. 20 Calibration of the quadratic voltage-phase relationship (see below) and the influence function are all that is necessary.…”

Section: Influence Function Superpositionmentioning

confidence: 99%

The use of a high-order MEMS deformable mirror in the Gemini Planet Imager

et al. 2011

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We briefly review the development history of the Gemini Planet Imager's 4K Boston Micromachines MEMS deformable mirror. We discuss essential calibration steps and algorithms to control the MEMS with nanometer precision, including voltage-phase calibration and influence function characterization. We discuss the integration of the MEMS into GPI's Adaptive Optics system at Lawrence Livermore and present experimental results of 1.5 kHz closed-loop control. We detail mitigation strategies in the coronagraph to reduce the impact of abnormal actuators on final image contrast.

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Open-loop control of a MEMS deformable mirror for large-amplitude wavefront control

Cited by 66 publications

References 20 publications

MEMS deformable mirrors for astronomical adaptive optics

MEMS deformable mirrors for astronomical adaptive optics

A Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systems

The use of a high-order MEMS deformable mirror in the Gemini Planet Imager

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