Atom tracking technology enhanced with innovative algorithms has been implemented in this study, utilizing a comprehensive suite of controllers and software independently developed domestically. Leveraging an on-board field-programmable gate array (FPGA) with a core frequency of 100 MHz, our system facilitates reading and writing operations across 16 channels, performing discrete incremental proportional-integral-derivative (PID) calculations in as fast as 3.4 microseconds. Building upon this foundation, gradient and extremum algorithms are further integrated, incorporating circular and spiral scanning modes with a horizontal movement accuracy of 0.38 pm. This integration enhances real-time performance and significantly increases the accuracy of atom tracking. Atom tracking achieves an equivalent precision of at least 142 pm on a highly oriented pyrolytic graphite (HOPG) surface under room temperature atmospheric conditions. Through applying computer vision and image processing algorithms, atom tracking can be used when scanning a large area. The techniques primarily consist of two algorithms: the region of interest (ROI)-based feature matching algorithm, which achieves 97.92% accuracy, and the feature description-based matching algorithm, with an impressive 99.99% accuracy. Both implementation approaches have been tested for scanner drift measurements, and these technologies are scalable and applicable in various domains of scanning probe microscopy with broad application prospects in the field of nanoengineering.