This paper presents results of analytical and numerical simulations of an electrostatically actuated microfuel injector. The electrostatic-structural coupling, efficiency of valves, and net flow rate of the pump are calculated using analytical relations and compared with numerical simulations. One way to increase flow rate is to increase the stroke volume, which may lead to large deflection of the diaphragm. Thus, the membrane load deflection relationship is no longer linear and when coupled to the inherently nonlinear fluid behavior leads to a complex problem. We used numerical methods to solve for the fluid-structure interaction and the large deflection of the membrane, and studied the effect of actuation frequency on the net flow rate.