In the QCD energy-momentum tensor T µν , the terms that contribute to physical matrix elements are expressed as the sum of the gauge-invariant quark part and gluon part. Each part undergoes the renormalization due to the interactions among quarks and gluons, although the total tensor T µν is not renormalized thanks to the conservation of energy and momentum. Recently it has been shown that, through the renormalization, each of the quark and gluon parts of T µν receives a definite amount of anomalous trace contribution, such that their sum reproduces the well-known QCD trace anomaly, T µ µ = (β/2g)F µν F µν + m(1 + γ m )ψψ, and the corresponding formulas have been derived up to two-loop order. We extend this result to the three-loop order, working out all the relevant three-loop renormalization structure for the quark and gluon energy-momentum tensors in the (modified) minimal subtraction scheme in the dimensional regularization. We apply our three-loop formula of the quark/gluon decomposition of the trace anomaly to calculate the anomaly-induced mass structure of nucleons as well as pions. * kztanaka@juntendo.ac.jp