Optical accelerometer based on grating interferometer with phase modulation technique

Zhao, Shuangshuang; Zhang, Juan; Hou, Cong-Cong; Bai, Jian; Yang, Guoguang

doi:10.1364/ao.51.007005

Cited by 36 publications

(15 citation statements)

References 22 publications

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“…Since the low thermal expansion coefficient of the grating on a quartz substrate, grating interferometers have the features of high reliability, high sensitivity, and small zero deviation drift. In recent years, researchers have applied grating interferometers to acceleration sensors and obtained good results [17][18][19][20][21][22][23][24]. In order to further improve the performance of the grating accelerometer, the acceleration and displacement sensing element of the elastic coefficient, the mass block, and the cross-axis suppression ratio needs to be further optimized.…”

Section: Introductionmentioning

confidence: 99%

Design and Modification of a High-Resolution Optical Interferometer Accelerometer

Yao

Pan

Wang

et al. 2021

Sensors

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The Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of accelerometer that combines the merits of optical measurement and Micro-Electro-Mechanical Systems (MEMS) to enable high precision, small volume, and anti-electromagnetism disturbance measurement of acceleration, which makes it a promising candidate for inertial navigation and seismic monitoring. This paper proposes a modified micro-grating-based accelerometer and introduces a new design method to characterize the grating interferometer. A MEMS sensor chip with high sensitivity was designed and fabricated, and the processing circuit was modified. The micro-grating interference measurement system was modeled, and the response sensitivity was analyzed. The accelerometer was then built and benchmarked with a commercial seismometer in detail. Compared to the previous prototype in the experiment, the results indicate that the noise floor has an ultra-low self-noise of 15 ng/Hz1/2.

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Section: Introductionmentioning

confidence: 99%

Design and Modification of a High-Resolution Optical Interferometer Accelerometer

Yao

Pan

Wang

et al. 2021

Sensors

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“…The interfering intensity can be changed by varying the distance between the grating and the reflector, so the architecture provides an efficient method to sense the varying distance with nanometer precision. By now, these two MEMS architectures have been widely been demonstrated for different sensing applications, including the accelerometer, [86][87][88] position sensor, [89,90] acoustic sensor, [91] out-ofplane measurement and in-plane measurements. [92,93]…”

Section: Light Source /Detectormentioning

confidence: 99%

MEMS gratings and their applications

Zhou

Lim

et al. 2021

International Journal of Optomechatronics

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Grating plays an essential role in various optical systems owing to its unique dispersion properties. In recent years, there is increasing demand to miniaturize optical systems for a wide range of field applications. Therefore, the integration of diffraction grating with MEMS technology provides an efficient way to build truly miniaturized optical systems. Till now, MEMS diffraction gratings have mainly been explored in two directions, namely MEMS scanning gratings and MEMS tunable gratings. MEMS scanning gratings are constructed with a variety of MEMS actuators to drive a grating platform to scan across the target, and they play a significant role in various scanning systems. Meanwhile, the dispersive properties of grating scanners make them attractive in wavelength sensing applications, including spectrometers and hyperspectral imaging systems. Tunable gratings typically employ MEMS actuators to dynamically change the diffraction properties, thus tuning its wavelength sensitivity for a specific application. Thus, this review will introduce these two types of MEMS gratings in detail and evaluate their efficiency and advantages in various fields.

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“…To analyze the rotation of the proof mass, more specifically, the rotation of the upper surface of the proof mass, the lateral position of the crab-shaped cantilevers and their torque should be taken into consideration. In a preliminary design reported in [17], the crab-shaped cantilevers are located at the edge of the proof mass on the cross section. That is to say, the center of the proof mass is off the axis of the cantilevers by a distance H/2, this ignores the thickness of the cantilevers.…”

Section: Mechanical Componentsmentioning

confidence: 99%

“…However, there has not been a systematic research concentrated on the cross-axis sensitivity of optomechanical accelerometers while the phenomena and mechanism differfrom traditional ones. Those optomechanical accelerometers based on optical interferometry have been verified to offer the possibility of obtaining high sensitivity [14][15][16][17]. Cross-axis sensitivity is detrimental to the performance of grating-based optomechanical accelerometers and an analysis to mitigate its effect on device sensitivity is therefore needed..…”

Section: Introductionmentioning

confidence: 99%

Minimizing cross-axis sensitivity in grating-based optomechanical accelerometers

Wang

Bai

et al. 2016

Opt. Express

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Cross-axis sensitivity of single-axis optomechanical accelerometers, mainly caused by the asymmetric structural design, is an essential issue primarily for high performance applications, which has not been systematically researched. This paper investigates the generating mechanism and detrimental effects of the cross-axis sensitivity of a high resoluion single-axis optomechanical accelerometer, which is composed of a grating-based cavity and an acceleration sensing chip consisting of four crab-shaped cantilevers and a proof mass. The modified design has been proposed and a prototype setup has been built based on the model of cross-axis sensitivity in optomechanical accelerometers. The characterization of the cross-axis sensitivity of a specific optomechanical accelerometer is quantitatively discussed for both mechanical and optical components by numerical simulation and theoretical analysis in this work. The analysis indicates that the cross-axis sensitivity decreases the contrast ratio of the interference signal and the acceleration sensitivity, as well as giving rise to an additional optical path difference, which would impact the accuracy of the accelerometer. The improved mechanical design is achieved by double side etching on a specific double-substrate-layer silicon-on-insulator (SOI) wafer to move the center of the proof mass to the support plane. The experimental results demonstrate that the modified design with highly symmetrical structure can suppress the cross-axis sensitivity significantly without compromising the sensitivity and resolution. The cross-axis sensitivity defined by the contrast ratio of the output signal drops to 2.19% /0.1g from 28.28%/0.1g under the premise that the acceleration sensitivity of this single-axis optomechanical accelerometer remains 1162.45V/g and the resolution remains 1.325μg.

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Optical accelerometer based on grating interferometer with phase modulation technique

Cited by 36 publications

References 22 publications

Design and Modification of a High-Resolution Optical Interferometer Accelerometer

Design and Modification of a High-Resolution Optical Interferometer Accelerometer

MEMS gratings and their applications

Minimizing cross-axis sensitivity in grating-based optomechanical accelerometers

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