Optical actuation and detection of MEMS resonators: Behavioral modeling and phase noise simulations

Papin, G.; Lévy, R.; Bosseboeuf, Alain; Fabbri, Filippo; Parrain, Fabien; Malak, Maurine; Bourouina, Tarik; Lissorgues, G.; Poulichet, Patrick

doi:10.1109/fcs.2012.6243656

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2017

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“…However, further details on noise level measurement can be found which would provide deeper insight in the noise measurement. (Bochobza-Degani et al 2003;Papin et al 2012) VII. CONCLUSION…”

Section: Experiementation Resultsmentioning

confidence: 99%

Design optimization for an SOI MOEMS accelerometer

Teo

Tan

et al. 2017

Microsyst Technol

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With optimization being vital, the design optimization of a silicon-on-insulator (SOI) micro-opto-electromechanical systems (MOEMS) accelerometer is discussed in this paper. This process has enabled a simplistic design that employs double-sided deep reactive ion etching (DRIE) on SOI wafer to be able to attain high sensitivity of 294 µW/G with a calculated proof mass displacement of 0.066 µm/G which was close to ANSYS simulated results of 0.061 µm/G. Optimization has also enabled an in-depth study of the effects of the different variables on the overall performance of the device.

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“…However, further details on noise level measurement can be found which would provide deeper insight in the noise measurement. (Bochobza-Degani et al 2003;Papin et al 2012) VII. CONCLUSION…”

Section: Experiementation Resultsmentioning

confidence: 99%

Design optimization for an SOI MOEMS accelerometer

Teo

Tan

et al. 2017

Microsyst Technol

View full text Add to dashboard Cite

show abstract

Optical actuation and detection of MEMS resonators: Behavioral modeling and phase noise simulations

Cited by 1 publication

References 10 publications

Design optimization for an SOI MOEMS accelerometer

Design optimization for an SOI MOEMS accelerometer

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