Optical and Electrical Properties of TiO₂/Co/TiO₂Multilayer Films Grown by DC Magnetron Sputtering

Abstract

Transparent oxide multilayer films of TiO2/Co/TiO2 were grown on glass substrate by DC magnetron sputtering technique. The optical and electrical properties of these films were analyzed with the aim of substituting ITO substrate in optoelectronic devices. The samples were characterized by UV-visible spectroscopy, atomic force microscopy (AFM), and Kelvin probe force microscopy (KPFM). The effect of Co interlayer thickness (4, 8, and 12 nm) on the transmittance spectra yielded an optical absorption edge shift. The work function of these films was determined by KPFM technique allowing us to predict the Fermi level shift by extending the model for pure materials to our multilayer system. The Fermi level and optical absorption edge seem to be correlated and shifted toward lower energies when Co interlayer thickness is increased.

Ga-Doped ZnO Coating—A Suitable Tool for Tuning the Electrode Properties in the Solar Cells with CdS/ZnS Core-Shell Quantum Dots

“…It can be seen that the single layer GZO and ITO/GZO without oxidation exhibited relatively low rejection ability of the IR component-the mean reflectance is 15-20%, which means that the transmission in the VIS and NIR ranges is almost the same (average A slight shift of the optical interference maximums and minimums to the longer wavelengths is noted for the strongest oxidized film ITO/GZO2 as compared to the rest films. This is in consistent with the literature [33][34][35] and can be explained with the increased thickness, which is the greatest for this sample. Single layer of GZO showed 91% optical transparency (excluding the effect of glass substrate) in the same region and UV transmittance close to zero, however, its electrical resistance was not suitable for electrode purposes.…”

Comparison of properties of multilayer film sputtered on glass and polypropylene substrates with angular DC magnetron Co-sputtering system

“…In both laboratory and industrial applications, planar and angular systems often utilize multiple cooperative magnetron targets, each equipped with two or more magnetron guns, to produce multilayer thin films. These sputtering techniques find diverse applications in the coating of solar cells [ 10 ], semiconductors [ 11 ], sensors [ 12 ], optoelectronic devices [ 13 ], and cutting tools [ 14 ]. In simpler methods like “co-sputtering” or “co-layering,” all targets in the sputtering system consist of the same pure materials and are mounted onto multiple magnetron guns.…”