“…This technique has been used to grow a wide variety of films, including diamond [18], as well as amorphous silicon nitride [19,20], semiconductor compounds [21], and more. Recently, the technique has been used to grow several nanostructures of different materials, such as silicon-rich oxides [22], nanocrystalline silicon [23], graphene [24], molybdenum selenide [25], silicon carbide [26], and zinc sulfide [27] among others, for applications in new or improved devices, such as solar cells, sensors, and metal oxide semiconductors (MOS) structures [18,23]. HFCVD technology is compatible with the current silicon-based technology, and it has advantages over other methods because it can produce materials at low cost, and on a wide substrate surface.…”