Optical and structural characterization of ZnO thin films and fabrication of bulk acoustic wave resonator (BAW) for the realization of gas sensors by stacking ZnO thin layers fabricated by e-beam evaporation and rf magnetron sputtering techniques

Atanas, Jean-Pierre; Asmar, R. Al; Khoury, A.; Foucaran, A.

doi:10.1016/j.sna.2005.11.065

Cited by 27 publications

(7 citation statements)

References 15 publications

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“…Of them, the peak at about 102 cm −1 is assigned to the E 2 low-frequency branch [E 2 (low)] and that at about 437 cm −1 to the E 2 high-frequency branch [E 2 (high)], associated with oxygen and Zn sublattices, respectively. They are the characteristic modes of ZnO as expected from the Raman selection rules in wurtzite crystal structure. − The Raman band corresponding to the longitudinal optical (LO) mode with A 1 symmetry usually appears near 574 cm −1 . , The LO mode is, however, actually composed of A 1 LO (574 cm −1 ) mode and E 1 LO (583 cm −1 ) mode from polarization fields parallel and perpendicular to the c axis, respectively. , For our nc-ZnO thin films, the Raman band corresponding to the E 1 LO mode centers at 583 cm −1 . The appearance of the above characteristic Raman peaks indicates the wurtzite phase of the prepared nc-ZnO films.…”

Section: Resultsmentioning

confidence: 73%

Influences of Substrate and Annealing on the Structural and Optical Properties and Photoluminescence of Nanocrystalline ZnO Films Prepared by Plasma Assisted Pulsed Laser Deposition

et al. 2009

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Single-crystalline silicon, amorphous quartz, and single-crystalline sapphire were used as the substrates for the deposition of nanocrystalline zinc oxide (nc-ZnO) thin films by plasma assisted pulsed laser deposition from metallic zinc at low temperature below 80 °C, and a postdeposition annealing process was performed for the deposited nc-ZnO thin films. The influences of substrate and annealing on the structural and optical properties as well as the photoluminescence of the prepared nc-ZnO thin films were studied. Raman spectroscopy and Fourier-transform infrared spectroscopy measurements reveal the wurtzite ZnO phase in the films. X-ray diffraction results indicate the nanocrystalline structure of the films with c axis perpendicular to substrates. Optical characterization shows that the prepared films have an ultraviolet (UV) absorption edge near 380 nm with a direct band gap of about 3.25 eV. The prepared films emit predominantly UV photoluminescence at light excitation. The structure and properties of the films are dependent on substrates and the annealing process has different influences for the films deposited on different substrates.

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Section: Resultsmentioning

confidence: 73%

Influences of Substrate and Annealing on the Structural and Optical Properties and Photoluminescence of Nanocrystalline ZnO Films Prepared by Plasma Assisted Pulsed Laser Deposition

et al. 2009

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“…Those properties are already used in emerging applications for transparent electrodes in liquid crystal displays, energy-saving or heat-protecting windows, thin-film transistor and lightemitting diode. ZnO is promising material for electronics and optoelectronic application such as solar cells [1] , gas sensors [2] , UV photo detectors [3] heat mirrors , wave devices and bulk acoustic wave resonators [4] etc. In this work, simple, low-cost technique is the chemical bath deposition (CBD) method to deposit ZnO nanoparticle thin films on the glass substrates has been investigated.…”

Section: Introductionmentioning

confidence: 99%

Preparation and characterization of nanostructured zinc oxide thin films

Abd‐Elkader¹

2012

AIP Conference Proceedings

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Thin films of Zinc Oxide (ZnO) were deposited on slide glass substrates by the chemical bath deposition technique (CBD). The formation of nanostructured ZnO thin films have been confirmed through XRD, TEM, and SEM. The structure properties were investigated by XRD. The optical properties were measured by UV-VIS spectrophotometer. The absorption coefficient is calculated from recorded data and it is best fitted for direct band gap. The direct band gap was in range 3.8-4.0 eV.

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“…In literature, many methods have been reported to deposit ZnO and AlN films including physical vapor deposition (PVD), such as sputtering, [54][55][56] evaporation, [57] pulsed laser deposition (PLD), [58,59] molecular beam epitaxy (MBE), [60,61] chemical vapor deposition (CVD). [62,63] Different deposition processes lead to different crystalline quality, temperature, costs, and rates of deposition.…”

Section: Processing Of Piezoelectric Materials For Polymeric Saw Devicesmentioning

confidence: 99%

Recent Progress in Polymeric Flexible Surface Acoustic Wave Devices: Materials, Processing, and Applications

Lamanna

2023

Adv Materials Technologies

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Recently, there has been a remarkable increase in interest in piezoelectric thin films, particularly zinc oxide (ZnO) and aluminum nitride (AlN), deposited on flexible polymeric substrates. This is due to the rapid expansion of fields such as robotics, wearable devices, and the Internet of Things (IoT). These thin‐film layered structures have a wide range of applications, such as energy harvesting, sensing and biosensing, microfluidic sorting, pumping and mixing, and telecommunications. One of the most promising platforms is piezoelectric acoustic‐based thin‐film devices on inexpensive, recyclable, or disposable polymeric substrates. Their reliability, reproducibility, conformability, small size, and wireless control capabilities make them a leading candidate for the development of new wireless, fully automated, and digitized microsystems for IoT and wearable devices. This review examines recent advancements in the engineering of ZnO and AlN thin films on polymeric, flexible, and conformable surface acoustic wave (SAW) devices. Topics covered include the materials used, piezoelectric film deposition, device fabrication, and the latest applications of this technology as sensors and actuators.

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Optical and structural characterization of ZnO thin films and fabrication of bulk acoustic wave resonator (BAW) for the realization of gas sensors by stacking ZnO thin layers fabricated by e-beam evaporation and rf magnetron sputtering techniques

Cited by 27 publications

References 15 publications

Influences of Substrate and Annealing on the Structural and Optical Properties and Photoluminescence of Nanocrystalline ZnO Films Prepared by Plasma Assisted Pulsed Laser Deposition

Influences of Substrate and Annealing on the Structural and Optical Properties and Photoluminescence of Nanocrystalline ZnO Films Prepared by Plasma Assisted Pulsed Laser Deposition

Preparation and characterization of nanostructured zinc oxide thin films

Recent Progress in Polymeric Flexible Surface Acoustic Wave Devices: Materials, Processing, and Applications

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