Optical and structural properties of low-temperature PECVD ETMS SiOx thin films

Song, Yifan; Sakurai, Takeshi; Kishimoto, Koichi; Maruta, Kazuhiko; Matsumoto, Shigeharu; Kikuchi, Kazuo

doi:10.1016/s0040-6090(98)01123-7

Cited by 17 publications

(6 citation statements)

References 15 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In contrast to the former, the latter are characterized by columnar growth morphology, and their lower density explains their lower barrier performance. The presence of Ar gas during deposition of PECVD SiO x was reported to lead to denser structures [121]. The density of PECVD SiO x coatings, and therefore their oxygen permeability, was found to be strongly dependent on process conditions such as input power, pressure, and O 2 /precursor ratio, the maximum density being slightly larger than 2.2 g/cm 3 [122].…”

Section: Coating and Interface Defectsmentioning

confidence: 99%

Durability of nanosized oxygen-barrier coatings on polymers

Leterrier

2003

Progress in Materials Science

472

341

View full text Add to dashboard Cite

Research on silicon oxide thin films developed as gas-barrier protection for polymer-based components is reviewed, with attention paid to the relations between (i) coating defects, cohesive strength and internal stress state, and (ii) interfacial interactions and related adhesion to the substrate. The deposition process of the oxide from a vapor or a plasma phase leads in both cases to the formation of covalent bonds between the two materials, with high adhesion levels. The oxide coating contains nanoscopic defects and microscopic flaws, and their respective effect on the barrier performance and mechanical resistance of the coating is analyzed. Potential improvements are discussed, including the control of internal stresses in the coating during deposition. Controlled levels of compressive internal stresses in the coating are beneficial to both the barrier performance and the mechanical reliability of the coated polymer. An optimal coating thickness, with low oxygen permeation and high cohesive strength, is determined from experimental and theoretical analyses of the failure mechanisms of the coating under mechanical load. These investigations are found relevant to tailor the interactions and stress state in the interfacial region, in order to improve the reliability of the coating/substrate assembly. #

show abstract

Section: Coating and Interface Defectsmentioning

confidence: 99%

Durability of nanosized oxygen-barrier coatings on polymers

Leterrier

2003

Progress in Materials Science

472

341

View full text Add to dashboard Cite

show abstract

“…In order to have the refractive index of SiO x as a function of x, we have taken several values from the literature [16] and performed an interpolation by using a polynomial fit. Then, we have applied the two-component Bruggemann formula which gives the effective dielectric constant of the core layer e eff by solving the implicit equation [17]:…”

Section: Article In Pressmentioning

confidence: 99%

Optical losses and gain in silicon-rich silica waveguides containing Er ions

Navarro-Urriós

Melchiorri

Daldosso

et al. 2006

Journal of Luminescence

View full text Add to dashboard Cite

“…The bending and stretching vibrations of the Si-O-Si bonds were observed at 810 and 1040-1070 cm −1 , respectively, for the samples seen in figures 5(c) and (d). The peak position at 1070 cm −1 revealed that the SiONWs were close to stoichiometric SiO 2 [12,13]. The absorption peaks proven to be sensitive to hydrocarbon species that bond with silicon atoms were not exhibited.…”

Section: Resultsmentioning

confidence: 97%

Direct synthesis of silicon oxide nanowires on organic polymer substrates

Yun¹,

Jeong²,

Lee³

2009

Nanotechnology

View full text Add to dashboard Cite

A nanowire growth model assisted by polymer reconstruction was discovered and used to achieve the direct synthesis of amorphous silicon oxide nanowires (SiONWs) on polyethylene terephthalate (PET) substrates at low growth temperatures (no more than 150 degrees C) using plasma-enhanced chemical vapor deposition (PECVD). The reconstructed polymers were generated from the scission and recombination of polymer chains on the surface of PET substrates under active Ar:O(2) plasma in the PECVD process. The highly ordered nanowire arrays exhibited an excellent geometrical configuration that is comparable to that of SiONWs grown on Si substrates at temperatures higher than 1000 degrees C by using conventional vapor deposition methods with various metal catalysts. A promising optical property-strong photoluminescence in the violet-blue spectral range at room temperature-was detected in the nanowires. This might lead to breakthroughs in the fabrication of electronic and optical nanoscale devices on flexible polymer substrates.

show abstract

Optical and structural properties of low-temperature PECVD ETMS SiOx thin films

Cited by 17 publications

References 15 publications

Durability of nanosized oxygen-barrier coatings on polymers

Durability of nanosized oxygen-barrier coatings on polymers

Optical losses and gain in silicon-rich silica waveguides containing Er ions

Direct synthesis of silicon oxide nanowires on organic polymer substrates

Contact Info

Product

Resources

About