2005
DOI: 10.1116/1.2091096
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Optical band gaps and composition dependence of hafnium–aluminate thin films grown by atomic layer chemical vapor deposition

Abstract: We report the optical properties of unannealed hafnium–aluminate (HfAlO) films grown by atomic layer chemical vapor deposition (ALCVD) and correlate them with the aluminum contents in the films. Vacuum ultraviolet spectroscopic ellipsometry (VUV-SE), high-resolution transmission electron microscopy (HRTEM), channeling Rutherford backscattering spectrometry (RBS), and resonant nuclear reaction analysis (NRA) were employed to characterize these films. In the analyses of ellipsometry data, a double Tauc–Lorentz d… Show more

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Cited by 57 publications
(24 citation statements)
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“…5). These results are in good agreement with previously ALCVD reported values [6,7]. As the nitrogen incorporation readily modifies the material properties, there is also an impact on the bandgap (Fig.…”
Section: Resultssupporting
confidence: 93%
See 1 more Smart Citation
“…5). These results are in good agreement with previously ALCVD reported values [6,7]. As the nitrogen incorporation readily modifies the material properties, there is also an impact on the bandgap (Fig.…”
Section: Resultssupporting
confidence: 93%
“…Spectra were recorded between 1.5 and 8 eV, in steps of 0.02 eV and the angle of incidence was set at 70°. For each sample a three layer model (high-K, Si02 interlayer, silicon) was used to assess the high-K dielectric function S{E) = s^{E)-is2{E), where s^ and s^ are the real and imaginary part of e. The thickness and the bandgap of the film are determined from the analysis of the raw data using a modified Tauc Lorentz law [5] with two oscillators [6,7]. The imaginary part of the dielectric function is given by the product of Tauc's law with the sum of two Lorentz oscillators.…”
Section: Auger Electron Spectroscopy (Aes)mentioning
confidence: 99%
“…Data were obtained through methods such as spectroscopic ellipsometry and electron energy loss spectroscopy. In these works the widening of the gap is reported to occur linearly with increasing Al content, [25][26][27] which seems to be in contradiction with results of the present study. However, leaving aside the possible processing-induced gap variations known for HfO 2 , 18,28,29 one may point out that in all these works on Hf:Al oxides the spectral dependences of optical or electron loss functions were fitted assuming a single bandgap value.…”
contrasting
confidence: 56%
“…to be 5.51 to 5.61 eV, 24 and together with the GaAs energy-band gap ( ) as 1.46 eV at 300 K, 25 the conduction-band offset (Δ ) was deduced to be 0.87-0.97 eV.…”
Section: Interface Energy-band Alignmentmentioning
confidence: 99%