2014
DOI: 10.4071/isom-wp17
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Optical Characterization and Defect inspection for 3D stacked IC technology

Abstract: Advanced packaging technologies are rapidly evolving and 3D architectures requires new inspection and metrology techniques. Existing techniques need to be improved but new techniques must be developed to address new challenges induced by the last fabrication processes. To increase the development speed, it is a big advantage that metrology and defect inspection need to be present on the same platform and a flexible tool, with multi sensors, to be more versatile facing the different step of the p… Show more

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“…OCT has been used for quality control of protective coatings used in automotive [1] and pharmaceutical industries [2]. Also in the manufacturing of thin layered devices such as ICs [3] and LCDs is OCT applicable for high accuracy quality control [4]. In clinical practice, OCT is regularly used for the delineation of thin retinal layers, which is of critical important in clinical diagnosis of eye diseases such as macular degeneration and glaucoma [5,6].…”
Section: Introductionmentioning
confidence: 99%
“…OCT has been used for quality control of protective coatings used in automotive [1] and pharmaceutical industries [2]. Also in the manufacturing of thin layered devices such as ICs [3] and LCDs is OCT applicable for high accuracy quality control [4]. In clinical practice, OCT is regularly used for the delineation of thin retinal layers, which is of critical important in clinical diagnosis of eye diseases such as macular degeneration and glaucoma [5,6].…”
Section: Introductionmentioning
confidence: 99%