2008
DOI: 10.1016/j.mejo.2008.01.062
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Optical characterization of InAs δ-layers grown by MBE at different substrate temperatures

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“…Recently, HEMT structures with InAsinserted channel have been demonstrated on GaAs substrates [6][7][8][9][10]. To explore various physical properties of InAs HEMTs structures, numerous characterization methods have been applied, including X-ray techniques, transmission electron microscopy (TEM) and photoluminescence spectroscopy (PL) [11][12][13][14]. Most of the above methods require special conditions such as low temperature (PL) or special sample preparation (TEM).…”
Section: Introductionmentioning
confidence: 99%
“…Recently, HEMT structures with InAsinserted channel have been demonstrated on GaAs substrates [6][7][8][9][10]. To explore various physical properties of InAs HEMTs structures, numerous characterization methods have been applied, including X-ray techniques, transmission electron microscopy (TEM) and photoluminescence spectroscopy (PL) [11][12][13][14]. Most of the above methods require special conditions such as low temperature (PL) or special sample preparation (TEM).…”
Section: Introductionmentioning
confidence: 99%