Optical DC overlay measurement in the 2nd level process of 65 nm alternating phase shift mask

Ma, Jian; Han, Ke; Lee, Kyung Hwa; Korobko, Yulia; Silva, Mary; Chavez, Joas; Irvine, B.; Henrichs, Sven E.; Chakravorty, K. K.; Olshausen, Robert; Chandramouli, Mahesh; Mammen, Bobby; Padmanaban, Ramaswamy

doi:10.1117/12.632160

Cited by 1 publication

(1 citation statement)

References 0 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…An error budget assessment comprehending all the relevant components, namely binary CD, Registration, Overlay, and Fidelity need to be carried out. The total error can be estimated as a sum of systematic CD and Overlay errors and root square sum of 3 sigma of the random errors for both the chrome and quartz patterning levels [7]. Intel's approach is to place the resist edge in the middle of the minimum chrome region.…”

Section: Figurementioning

confidence: 99%

Alternating phase shift mask technology for 65nm logic applications

et al. 2006

Self Cite

View full text Add to dashboard Cite

Alternating Phase Shift Mask (APSM) Technology has been developed and successfully implemented for the poly gate of 65nm node Logic application at Intel. This paper discusses the optimization of the mask design rules and fabrication process in order to enable high volume manufacturability.Intel's APSM technology is based on a dual sided trenched architecture. To meet the stringent OPC requirements associated with patterning of narrow gates required for the 65nm node, Chrome width between the Zero and Pi aperture need to be minimized. Additionally, APSM lithography has an inherently low MEEF that furthermore, drives a narrower Chrome line as compared to the Binary approach. The double sided trenched structure with narrow Chrome lines are mechanically vulnerable and prone to damage when exposed to conventional mask processing steps. Therefore, new processing approaches were developed to minimize the damage to the patterned mask features. For example, cleaning processes were optimized to minimize Chrome & quartz damage while retaining the cleaning effectiveness. In addition, mask design rules were developed which ensured manufacturability. The narrow Chrome regions between the zero and Pi apertures severely restrict the tolerance for the placement of the second level resists edges with respect to the first level. UV Laser Writer based resist patterning capability, capable of providing the required Overlay tolerance, was developed, An AIMS based methodology was used to optimize the undercut and minimize the aerial image CD difference between the Zero and Pi apertures.

show abstract

Section: Figurementioning

confidence: 99%