Optical Depth Measurement for Microgrooves: A Self-interferometry Method based on Near-field Polarization Analysis

Guan, Yizhao; Masui, Shuzo; Kadoya, Shotaro; Michihata, Masaki; Takahashi, Satoru

doi:10.3850/978-981-18-6021-8_or-15-0084.html

Asian Society for Precision Engineering and Nanotechnology (ASPEN 2022) 2022

DOI: 10.3850/978-981-18-6021-8_or-15-0084.html

|View full text |Cite

Optical Depth Measurement for Microgrooves: A Self-interferometry Method based on Near-field Polarization Analysis

Yizhao Guan¹,

Shuzo Masui²,

Shotaro Kadoya³

et al.

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

Supporting

Mentioning

Contrasting

Year Published

2024

Publication Types

Select...

Article1

Relationship

Self Cite0

Independent1

Authors

Journals

Cited by 1 publication

References 6 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

Advanced Sensing and Machine Learning Technologies for Intelligent Measurement in Smart and Precision Manufacturing

Sato,

Li,

Michihata

et al. 2024

IJAT

View full text Add to dashboard Cite

This paper provides an overview of state-of-the-art sensing and machine learning technologies for intelligent measurement in smart and precision manufacturing. Length, angle, and force are identified as the fundamental quantities for production quality management based on process monitoring as well as geometrical metrology in optical lithography and mechanical machining. Advancements in length-based measurement technologies such as laser interferometers and optical encoders, as well as advancements regarding depth and thickness measurements, are presented. Various types of optical microscopes, such as evanescent field microscopes, structured illumination microscopes, and confocal microscopes, are also described. For angle-based measurement technologies, in addition to the conventional continuous-wave laser autocollimators, the newly developed Fabry–Pérot angle sensor and nonlinear optics angle sensor using an ultrashort pulse laser are presented. Finally, on-machine and in-process force sensing and machining learning techniques for dimensional and machining process monitoring are reviewed.

show abstract

Advanced Sensing and Machine Learning Technologies for Intelligent Measurement in Smart and Precision Manufacturing

Sato,

Li,

Michihata

et al. 2024

IJAT

View full text Add to dashboard Cite

show abstract

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

Contact Info

customersupport@researchsolutions.com

10624 S. Eastern Ave., Ste. A-614

Henderson, NV 89052, USA

This site is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.

Blog Terms and Conditions API Terms Privacy Policy Contact Cookie Preferences Do Not Sell or Share My Personal Information

Made with 💙 for researchers

Part of the Research Solutions Family.

Optical Depth Measurement for Microgrooves: A Self-interferometry Method based on Near-field Polarization Analysis

Cited by 1 publication

References 6 publications

Advanced Sensing and Machine Learning Technologies for Intelligent Measurement in Smart and Precision Manufacturing

Advanced Sensing and Machine Learning Technologies for Intelligent Measurement in Smart and Precision Manufacturing

Contact Info

Product

Resources

About