Optical design of high power excimer laser system

Yongsheng, 张永生 Zhang; Jun, 赵军 Zhao; Lianying, 马连英 Ma; Aiping, 易爱平 Yi; Jingru, 刘晶儒 Liu

doi:10.3788/hplpb20112307.1857

Cited by 1 publication

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“…Aiming at the above characteristics of the laser beam, the goal of laser beam shaping can be summarized as: while keeping the small spot to ensure the cleaning effect, but the high energy in laser spot must be redistributed into a Top-Hat distribution which can improve the cleaning efficiency [7,8] .…”

Section: Laser Beam Shaping Schemementioning

confidence: 99%

Research of the optical structure for a handled laser-cleaner

Liu

Wang

et al. 2014

SPIE Proceedings

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Aimed at solving the optical defects of the traditional handled laser-cleaners, such as inhomogeneous power distribution, large caliber, high cost of range-finder and complex control system, the feature of the laser beam is analyzed, the formula of the power average density distribution in the fiber laser-cleaner are discussed, and a new optical shaping method is presented in this paper. In order to regulate the infrared gauss laser beam and redistribute the high density power from the center to the edge, the system simulation utilized a ray tracing method which contains a Kepler telescope system made by two aspherical lenses. As a result, the laser power was compensated and homogenized; the lap joint ratio of laser patch was reduced; and the cleaning speed can be increased. Based on the features of the free-space optical system, the multi-layer optical design method was utilized. The traditional laser range-finder was replaced by the optical focusing design which could clearly point out the best working area, reduce a lot of optic-electronic elements, and simplify the structure of the cleaner's output-end. On the other hand, this method would not cause any losses of the working laser power. Besides, a visible direction light was added into the invisible infrared working laser for safety.

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Section: Laser Beam Shaping Schemementioning

confidence: 99%