Optical Detection of the Electromechanical Response of MEMS Micromirrors Designed for Scanning Picoprojectors

Silva, Gloria; Carpignano, F.; Guerinoni, Federica; Costantini, Sonia; Fazio, Marco; Merlo, S.

doi:10.1109/jstqe.2014.2369499

Cited by 34 publications

(14 citation statements)

References 28 publications

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“…Several instruments are based on sophisticated analyses of detected images: estimation of static and dynamic behaviors usually require different, convoluted schemes, supported by sampling techniques and post-processing. Characterization methods of MEMS devices based on spot optical measurements are able to give quite valuable information, even on single events, in real time with much easier procedures [14,15,16,17,18]. In view of the breakthrough of thin-film technology in MEMS production lines, there is an increasing interest in the development of instrumental configurations with compact setups for device testing, that are able to provide data in real-time on different features of the fabricated micro-devices, possibly with high spatial resolution.…”

Section: Introductionmentioning

confidence: 99%

Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence Reflectometry

Merlo

Crisà

et al. 2017

Sensors

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In this work, we have applied optical low-coherence reflectometry (OLCR), implemented with infra-red light propagating in fiberoptic paths, to perform static and dynamic analyses on piezo-actuated glass micro-membranes. The actuator was fabricated by means of thin-film piezoelectric MEMS technology and was employed for modifying the micro-membrane curvature, in view of its application in micro-optic devices, such as variable focus micro-lenses. We are here showing that OLCR incorporating a near-infrared superluminescent light emitting diode as the read-out source is suitable for measuring various parameters such as the micro-membrane optical path-length, the membrane displacement as a function of the applied voltage (yielding the piezo-actuator hysteresis) as well as the resonance curve of the fundamental vibration mode. The use of an optical source with short coherence-time allows performing interferometric measurements without spurious resonance effects due to multiple parallel interfaces of highly planar slabs, furthermore selecting the plane/layer to be monitored. We demonstrate that the same compact and flexible setup can be successfully employed to perform spot optical measurements for static and dynamic characterization of piezo-MEMS in real time.

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Section: Introductionmentioning

confidence: 99%

Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence Reflectometry

Merlo

Crisà

et al. 2017

Sensors

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“…A charge-coupled device camera and synchronized pulsating illumination has been also used to measure sub-micrometer in-plane dynamics of MEMS devices with nanoscale precision [56]. Another interesting case of optical detection consists in the acquisition of the electromechanical response of a MEMS-technology based micro-mirror used in scanning pico-projectors [57].…”

Section: Vibrational Mode Analysismentioning

confidence: 99%

Mechanical Response of Four-Bar Linkage Microgrippers with Bidirectional Electrostatic Actuation

et al. 2018

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This paper presents both an experimental and a numerical study concerning the mechanical response of a silicon microgripper with bidirectional electrostatic actuation to externally applied excitations. The experimental set-up is composed of a probe station equipped with mobile probes that apply contact forces. This part of the investigation aims to test the device’s mechanical resistance, its mobility capability and possible internal contacts during the system deformation. The second part of the paper is dedicated to the study of the free undamped vibrations of the microsystem. Finite Element Analysis (FEA) is carried out to evaluate the system vibration modes. The analysis of the modes are useful to predict possible mechanical interference among floating and anchored fingers of the actuating comb drives.

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“…Their use as micromirrors has led to the rapid advances in digital light processing [1]; they have been shown to act as thermal infrared detectors [2,3] and also as resonant mass sensing devices [4,5]. A resonant micropaddle is one such resonant torsional system and has been considered as a potential bio/chemical sensor platform [6,7].…”

Section: Introductionmentioning

confidence: 99%

Mechanical Characterization of Torsional Micropaddles Using Atomic Force Microscopy

et al. 2018

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The reference cantilever method is shown to act as a direct and simple method for determination of torsional spring constant. It has been applied to the characterization of micropaddle structures similar to those proposed for resonant functionalized chemical sensors and resonant thermal detectors. It is shown that this method can be used as an effective procedure to characterize a key parameter of these devices and would be applicable to characterization of other similar MEMS/NEMS devices such as micromirrors. In this study, two sets of micropaddles are manufactured (beams at centre and offset by 2.5 μm) by using LPCVD silicon nitride as a substrate. The patterning is made by direct milling using focused ion beam. The torsional spring constant is achieved through micromechanical analysis via atomic force microscopy. To obtain the gradient of force curve, the area of the micropaddle is scanned and the behaviour of each pixel is investigated through an automated developed code. The experimental results are in a good agreement with theoretical results.

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Optical Detection of the Electromechanical Response of MEMS Micromirrors Designed for Scanning Picoprojectors

Cited by 34 publications

References 28 publications

Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence Reflectometry

Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence Reflectometry

Mechanical Response of Four-Bar Linkage Microgrippers with Bidirectional Electrostatic Actuation

Mechanical Characterization of Torsional Micropaddles Using Atomic Force Microscopy

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