1995
DOI: 10.1109/16.372066
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Optical devices from AlGaAs-GaAs HBTs heavily doped with amphoteric Si

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Cited by 6 publications
(2 citation statements)
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“…Such directions lead to the “Beyond CMOS” technology. GaAs can also be used to fabricate other functional devices such as RF detectors and rectennas (ex: this work), optical devices and sensors to be integrated with conventional Si CMOS and other Si based functional devices such RF-CMOS, NEMS etc to realize the IQ chip concept [ 29 ]. Therefore, the value of hybridization of GaAs and Si technologies is apparent.…”
Section: Importance Of Gaas Based Chip Structure On Si Platform and Imentioning
confidence: 99%
“…Such directions lead to the “Beyond CMOS” technology. GaAs can also be used to fabricate other functional devices such as RF detectors and rectennas (ex: this work), optical devices and sensors to be integrated with conventional Si CMOS and other Si based functional devices such RF-CMOS, NEMS etc to realize the IQ chip concept [ 29 ]. Therefore, the value of hybridization of GaAs and Si technologies is apparent.…”
Section: Importance Of Gaas Based Chip Structure On Si Platform and Imentioning
confidence: 99%
“…1-4 Furthermore, they have been used widely for monolithic microwave integrated circuit ͑MMIC͒ and optoelectronic integrated circuit ͑OEIC͒ applications in recent years. 5,6 In previous studies of GaAs-based HBTs, the InGaP-GaAs and AlGaAs-GaAs material systems were usually employed. The Al X Ga 1−X As/ GaAs material system showed some advantages such as excellent lattice match with varied aluminum content and mature epitaxial growth technology.…”
Section: Introductionmentioning
confidence: 99%