2021
DOI: 10.1063/5.0060246
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Optical direct write of Dolan–Niemeyer-bridge junctions for transmon qubits

Abstract: We characterize highly coherent transmon qubits fabricated with a direct-write photolithography system. Multi-layer evaporation and oxidation allow us to change the critical current density by reducing the effective tunneling area and increasing the barrier thickness. Surface treatments before resist application and again before evaporation result in high-coherence devices. With optimized surface treatments, we achieve energy relaxation T1 times in excess of 80 μs for three dimensional transmon qubits with Jos… Show more

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Cited by 4 publications
(3 citation statements)
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“…31 The Al/AlO x /Al junctions are often fabricated by exposing the metallic surface to O 2 (at room temperature in the mbar range). 32 Moreover, the uncontrolled oxidation of the Al electrodes and the formation of a lossy amorphous dielectric oxide can be a source of decoherence for the qubit. 33−36 We preferred to study the oxidation on aluminum single crystals, Al(111), rather than on the deposited polycrystalline film.…”
Section: Introductionmentioning
confidence: 99%
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“…31 The Al/AlO x /Al junctions are often fabricated by exposing the metallic surface to O 2 (at room temperature in the mbar range). 32 Moreover, the uncontrolled oxidation of the Al electrodes and the formation of a lossy amorphous dielectric oxide can be a source of decoherence for the qubit. 33−36 We preferred to study the oxidation on aluminum single crystals, Al(111), rather than on the deposited polycrystalline film.…”
Section: Introductionmentioning
confidence: 99%
“…We have considered Al oxidation in O 2 because of its historical role in establishing the oxidation models ,, and because it keeps attracting considerable attention both experimentally and theoretically. ,, ,, Aluminum is also the material of choice in the fabrication of Josephson junction qubits, for which the oxidation of the metal is a vital issue . The Al/AlO x /Al junctions are often fabricated by exposing the metallic surface to O 2 (at room temperature in the mbar range) . Moreover, the uncontrolled oxidation of the Al electrodes and the formation of a lossy amorphous dielectric oxide can be a source of decoherence for the qubit. We preferred to study the oxidation on aluminum single crystals, Al(111), rather than on the deposited polycrystalline film.…”
Section: Introductionmentioning
confidence: 99%
“…It has been shown that TLS defects are mainly located at metal-air (MA), substrate-air (SA), and metal-substrate (MS) interfaces [15][16][17][18][19] . The contribution of losses from these interfaces can be minimized by implementing careful surface treatments thus enhancing the coherence of the devices 20,21 .…”
mentioning
confidence: 99%