Optical element for full spectral purity from IR-generated EUV light sources

Boogaard, A. J. R. van den; Louis, Eric; Goor, F.A. van; Bijkerk, F.

doi:10.1117/12.829011

Cited by 16 publications

(13 citation statements)

References 4 publications

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“…Van den Boogaard et al proposed to use such a large period blazed grating to eliminate the CO 2 driver laser radiation from a laser plasma EUV source. 157 However, the unavailability of a large-period blazed grating with high quality grooves still limits the achieved EUV reflectivity.…”

Section: Blazed Grating Based Spfmentioning

confidence: 99%

Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

Huang

Медведев

Kruijs

et al. 2017

Applied Physics Reviews

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Extreme ultraviolet and soft X-ray (XUV) multilayer optics have experienced significant development over the past few years, particularly on controlling the spectral characteristics of light for advanced applications like EUV photolithography, space observation, and accelerator- or lab-based XUV experiments. Both planar and three dimensional multilayer structures have been developed to tailor the spectral response in a wide wavelength range. For the planar multilayer optics, different layered schemes are explored. Stacks of periodic multilayers and capping layers are demonstrated to achieve multi-channel reflection or suppression of the reflective properties. Aperiodic multilayer structures enable broadband reflection both in angles and wavelengths, with the possibility of polarization control. The broad wavelength band multilayer is also used to shape attosecond pulses for the study of ultrafast phenomena. Narrowband multilayer monochromators are delivered to bridge the resolution gap between crystals and regular multilayers. High spectral purity multilayers with innovated anti-reflection structures are shown to select spectrally clean XUV radiation from broadband X-ray sources, especially the plasma sources for EUV lithography. Significant progress is also made in the three dimensional multilayer optics, i.e., combining micro- and nanostructures with multilayers, in order to provide new freedom to tune the spectral response. Several kinds of multilayer gratings, including multilayer coated gratings, sliced multilayer gratings, and lamellar multilayer gratings are being pursued for high resolution and high efficiency XUV spectrometers/monochromators, with their advantages and disadvantages, respectively. Multilayer diffraction optics are also developed for spectral purity enhancement. New structures like gratings, zone plates, and pyramids that obtain full suppression of the unwanted radiation and high XUV reflectance are reviewed. Based on the present achievement of the spectral tailoring multilayer optics, the remaining challenges and opportunities for future researches are discussed.

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Section: Blazed Grating Based Spfmentioning

confidence: 99%

Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

Huang

Медведев

Kruijs

et al. 2017

Applied Physics Reviews

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“…Various spectralselective diffractive elements are applied either for spectral analysis or for spectral filtering. In the past 20 years various combinations of grating structures with multilayer Bragg-reflector coatings were intensively explored as optical elements with improved spectral characteristics specifically for the EUV and soft X-ray ranges of the electromagnetic spectrum [1][2][3][4][5][6][7].…”

Section: Introductionmentioning

confidence: 99%

“…Along with a variety of different types of spectral purity filters [13][14][15][16][17][18][19][20], multilayer grating designs have been proposed earlier for suppression of OoB radiation in [6,7]. As an advantage application of multilayer grating mirrors for the radiation filtering allows straightforward cooling unlike free-standing grids and foils, and these ideally could replace a standard multilayer optical element that allows to avoid introduction of additional elements in the existing optical system.…”

Section: Introductionmentioning

confidence: 99%

“…These filter designs use a filtering principle based on the diffractive deflection of OoB radiation from the direction of EUV beam propagation. For instance, van den Boogaard et al showed the potential of achieving full spectral separation of EUV and IR radiation by application of a Mo/Si multilayer coated blazed grating [6]. However fabrication of such blazed multilayer grating possessing high EUV reflectance requires an application grating substrate with roughness adequate for deposition of Mo/Si coating [21], which is still a big technical challenge.…”

Section: Introductionmentioning

confidence: 99%

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Infrared diffractive filtering for extreme ultraviolet multilayer Bragg reflectors

Медведев¹,

Boogaard²,

Meer³

et al. 2013

Opt. Express

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We report on the development of a hybrid mirror realized by integrating an EUV-reflecting multilayer coating with a lamellar grating substrate. This hybrid mirror acts as an efficient Bragg reflector for extreme ultraviolet (EUV) radiation at a given wavelength while simultaneously providing spectral-selective suppression of the specular reflectance for unwanted longer-wavelength radiation due to the grating phase-shift resonance. The test structures, designed to suppress infrared (IR) radiation, were fabricated by masked deposition of a Si grating substrate followed by coating of the grating with a Mo/Si multilayer. To give the proof of principle, we developed such a hybrid mirror for the specific case of reflecting 13.5 nm radiation while suppressing 10 μm light, resulting in 61% reflectance at the wavelength of 13.5 nm together with the 70 × suppression rate of the specular reflection at the wavelength of 10 μm, but the considered filtering principle can be used for a variety of applications that are based on utilization of broadband radiation sources.

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“…Hence additional spectral filters have to be introduced into the optical path. Various filter designs have been proposed for suppression of DUV and IR radiation, including thin foil filters [4], grid-type filters [5] and reflective grating-like optics [6]. For the suppression of DUV radiation, an efficient way is the addition of specific capping layers on top of standard Mo/Si multilayers.…”

Section: Introductionmentioning

confidence: 99%

DLC/Si multilayer mirrors for EUV radiation

et al. 2010

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In this paper, a new type of spectral filter mirrors for extreme ultraviolet radiation based on DLC/Si multilayer coatings is presented (DLC - diamond-like carbon). The coating is nearly transparent for infrared radiation (IR) of lambda=10.6 nm but highly reflective at lambda=13.5 nm (EUV). We deposited DLC/Si multilayers by ion beam sputter deposition with 40 and 60 periods exhibiting maximum EUV reflectances of about R(sub max)=43 % and R(sub max)=50 %, respectively. Combining IR antireflective and EUV reflective coatings, first prototype mirrors have been fabricated with an EUV reflectance of about 42.5 % and an IR reflectance of about 4.4 % at the same time. Investigations on the thermal behavior of the multilayer stack and the cleaning properties for tin contaminated mirror surfaces have been carried out. Excellent stabilities of EUV peak position and reflectance values have been found using annealing temperatures of up to 700 degrees C. Furthermore, several cycles of Sn etching under H(sub 2) reactive conditions have been applied to the mirrors without significant changes of the filter performance

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Optical element for full spectral purity from IR-generated EUV light sources

Cited by 16 publications

References 4 publications

Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

Infrared diffractive filtering for extreme ultraviolet multilayer Bragg reflectors

DLC/Si multilayer mirrors for EUV radiation

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