Optical emission spectroscopy study of the influence of the low-energy electron beam parameters on the content of neutral atomic nitrogen in the beam plasma

Men’shakov, A. I.; Surkov, Yu. S.; Solomonov, V. I.; Гаврилов, Н. М.

doi:10.1088/1742-6596/1115/3/032010

Cited by 2 publications

(1 citation statement)

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“…Optical spectroscopy is a non-perturbing diagnostic technique used to estimate parameters of a wide variety of plasmas, including the beam plasma in medium vacuum [17,18]. The electron energies required to excite the glow of gas atoms and molecules are normally less than their ionization energies, suggesting that consideration of the relationship between the intensities of different emission lines of the working gas may allow the target potential to be estimated, even if it is rather small.…”

Section: Introductionmentioning

confidence: 99%

Estimation and control of low (<100 V) potential on a dielectric target irradiated by an electron beam at fore-vacuum pressure

Zolotukhin

Бурдовицин

Окс

2021

Plasma Sources Sci. Technol.

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We propose a method for estimation of the relatively low values (less than 100 V) of the steady-state negative potential built-up on a dielectric target irradiated by an electron beam at fore-vacuum pressure. The method is based on comparing the intensity of the emission lines of excited helium to similar emission lines for the known potential of a metal target. At low values of potential, we measured the plasma parameters in the region of the target and determined the contribution to ionization processes from each of the electron components: fast beam electrons, secondary electrons from the target, and plasma electrons.

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Section: Introductionmentioning

confidence: 99%