1977
DOI: 10.1007/bf00619527
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Optical estimation of statistics of surface roughness from light scattering measurements

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Cited by 127 publications
(35 citation statements)
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“…These functions are given, respectively, by the expressions C(r) = exp(-r2/a2), (1) and C(r) = exp(-r/a). (2) With reference to Figures 1 and 2, we can see that, in all four cases, the Gaussian correlation seems to provide a better fit to the experimental data. The estimated power spectra are shown in the lower part of the figures.…”
Section: Surface Preparation and Characterizationmentioning
confidence: 79%
“…These functions are given, respectively, by the expressions C(r) = exp(-r2/a2), (1) and C(r) = exp(-r/a). (2) With reference to Figures 1 and 2, we can see that, in all four cases, the Gaussian correlation seems to provide a better fit to the experimental data. The estimated power spectra are shown in the lower part of the figures.…”
Section: Surface Preparation and Characterizationmentioning
confidence: 79%
“…There has always been an intrinsic interest in optical methods of measuring roughness, and this has generated a formidable literature: two recent reviews are by Welford (1977) and Vorburger and Teague (1981). Apart from these techniques there is a current need for practical transducers for the adaptive control of machining operations in automatic production processes.…”
Section: Measurementmentioning
confidence: 99%
“…Many of the works on inverse scattering have focused on the retrieval of some statistical properties of the surface under study [8,9,10,11,12]. The reconstruction of surface profiles from far-field amplitude data has been considered by Wombel and DeSanto [13,14], Quartel and Sheppard [15,16], and Macías et al [17].…”
Section: Introductionmentioning
confidence: 98%