2023
DOI: 10.1109/jsen.2023.3301870
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Optical Frequency Comb-Based Aerostatic Micro Pressure Sensor Aided by Machine Learning

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Cited by 3 publications
(1 citation statement)
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“…In recent years, MRR has attracted broad research interest in sensing applications due to their compact footprint [1], [2], low power consumption [1], low cost [2], convenience of integration [1], easy fabrication [2], high sensitivity [2] and the ability to work with complimentary metal-oxide-semiconductor (CMOS) technology [3]. Today, the MRR are practical devices in sensing application fields such as biochemical [4]- [7], gas [8]- [10], temperature [11]- [13] and pressure sensors [14]- [17].…”
Section: Introductionmentioning
confidence: 99%
“…In recent years, MRR has attracted broad research interest in sensing applications due to their compact footprint [1], [2], low power consumption [1], low cost [2], convenience of integration [1], easy fabrication [2], high sensitivity [2] and the ability to work with complimentary metal-oxide-semiconductor (CMOS) technology [3]. Today, the MRR are practical devices in sensing application fields such as biochemical [4]- [7], gas [8]- [10], temperature [11]- [13] and pressure sensors [14]- [17].…”
Section: Introductionmentioning
confidence: 99%