Optical heterodyne profilometer to scan irregularities in reflective objects

Baltazar, Rosario; Solano, Cristina; Martinez-Ponce, Geminiano; P, Alma A. Camacho

doi:10.1016/s0030-4018(02)01212-9

Cited by 6 publications

(2 citation statements)

References 27 publications

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“…These heterodyne phase detection principle based methods have wide applications [206][207][208][209]. Some adopt acousto-optic modulators [210][211][212] to obtain frequency differences between the measuring and reference beams while others employ oscillating gratings [213].…”

Section: Profile Measurement 421 Point-wise Mechanical Scanningmentioning

confidence: 99%

A review of interferometry for geometric measurement

Yang

Zhang

2018

Meas. Sci. Technol.

124

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As high-precision measuring instruments have developed, interferometers have been widely applied in the measurement of lengths and of the shape of surfaces, with nanometer precision. The emergence of the laser is one of the revolutions that has led to a well-defined traceability route to the definition of the meter via interferometry. Another change is the ever-increasing adoption of detector arrays substituting for conventional methods of recording and analyzing interferograms. New applications have also arisen from the adoption of microscopes, optical fibers, chip-level components and diffractive optical elements, developing enhanced analogues of conventional interferometers, which have the advantages of high integration, low noise levels, and complete sets of measuring instruments with a high level of automation. Since the requirements for measurement parameters and the environment are becoming more complex, we expect that the related instruments will play a progressively significant role in the progress of advanced manufacturing processes and quality control. Multi-sensor integrated flexible measurement methods have been proposed to perform measurements with holistic, more accurate and reliable information. However, most of the proposed methods are not intelligent and are highly integrated, providing only specific solutions for given measuring tasks. In this paper, the principles, progress, prospects and development trends of interferometry are reviewed.

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Section: Profile Measurement 421 Point-wise Mechanical Scanningmentioning

confidence: 99%

A review of interferometry for geometric measurement

Yang

Zhang

2018

Meas. Sci. Technol.

124

View full text Add to dashboard Cite

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“…Optical parameters of a sample can be determined using traditional interferometers [1][2][3][4][5][6][7][8] or a near common-path interferometer [9]. In which, the near common-path one provides high measurement stability but is complicate in optical structure and limited to sample height detection.…”

Section: Introductionmentioning

confidence: 99%

Refractive Index and Thickness Determinations Using a Dual-Path Mach-Zehnder Interferometer

Lin

2008

KEM

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This paper introduces a dual-path Mach-Zehnder interferometer for determining refractive index and geometrical thickness of an optical plate. In this interferometer, two parallel incident beams are separated into two interference pairs which are then recombined to generate two interference signals. An optical plate is placed on the path of one wave of an interference pair, so the phase difference of the interference signals is a function of the plate, and the interferometer is thus able to determine the index and thickness of the plate. A setup constructed to realize the proposed interferometer is described. And the experimental results of applying this setup agree the validity of the interferometer.

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