Optical Inspection of the Silicon Micro-strip Sensors for the CBM Experiment employing Artificial Intelligence
E. Lavrik,
M. Shiroya,
H. R. Schmidt
et al.
Abstract:Optical inspection of 1191 silicon micro-strip sensors was performed using a custom made optical inspection setup, employing a machine-learning based approach for the defect analysis and subsequent quality assurance. Furthermore, metrological control of the sensor's surface was performed. In this manuscript, we present the analysis of various sensor surface defects. Among these are implant breaks, p-stop breaks, aluminium strip opens, aluminium strip shorts, surface scratches, double metallization layer defect… Show more
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