Microsc Microanal
 2006
DOI: 10.1017/s1431927606065597
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Optical Interferometer Microscope for Monitoring and Control of Focused Ion Beam Processes

D. P. Adams
1
,
MB Sinclair
2
,
T. M. Mayer
3
et al.

Abstract: Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

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