IntroductionEfficient wavelength conversion devices using second-order optical nonlinearity of semiconductor materials are attractive for new light sources in the undeveloped frequency region. Especially, difference frequency generation (DFG) methods with high conversion efficiency enable us to develop compact terahertz emitters operating at roomtemperature. A half-wavelength (λ/2) cavity structure sandwiched between two GaAs/AlAs distributed Bragg reflector (DBR) multilayers is useful for nonlinear optical devices such as all-optical Kerr gate switches [1,2] because extremely strong light field is realized in the λ/2 cavity layer. Recently, we have proposed a GaAs/AlAs coupled multilayer cavity structure, where two λ/2 cavity layers are coupled by the intermediate DBR multilayer, grown on a high-index GaAs substrate.[3] Two cavity modes are realized in the center of the high reflection band, and its frequency difference can be precisely defined in the terahertz region by the number of periods of the coupling DBR multilayer. We can expect strong frequency mixed signal from the two cavity-mode lights with different fundamental frequencies, since the light electric field of each cavity mode is strongly enhanced in both of the two λ/2 cavity layers. Growth of the coupled cavity structure on a non-(001) substrate is essential for the frequency mixing because the effective second-order nonlinear coefficient is zero on the conventional (001) orientation due to crystal symmetry. [4] The growth on the (113)B substrate would be beneficial for the high conversion efficiency with keeping good crystalline quality of the epitaxial layers. In fact, Kaneko et al. demonstrated blue vertical-cavity surface-emitting lasers (VCSELs) based on second-harmonic generation (SHG) grown on the (113)B GaAs substrate. [5] In this study, the GaAs/AlAs coupled multilayer cavity structure was grown on the (113)B-oriented GaAs substrates by molecular beam epitaxy (MBE). Strong sum frequency generation (SFG) using the two cavity modes were demonstrated by the ultrashort pulse laser excitation.