Optical lithography: 40 years and holding

Bruning, John H.

doi:10.1117/12.720631

Cited by 64 publications

(27 citation statements)

References 11 publications

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“…Pattern generation was a tedious manual process. Moreover the large Rubylith master needed to be reduced many times using a large reduction copy camera [13]. Following Deng's work, many others [14][15][16] tried to improve performances.…”

Section: Open Accessmentioning

confidence: 99%

Photomasks Fabrication Based on Optical Reduction for Microfluidic Applications

et al. 2013

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Abstract:A procedure for fabrication of photomasks on photographic films with minimum feature achievable of about 20 μm, which are particularly suitable for the fast prototyping of microfluidic devices, has been improved. We used a commercial photographic enlarger in reverse mode obtaining 10:1 reduction factor with error less than 1%. Masks have been characterized by optical transmission measurement and contact profilometry: the exposed region completely absorbs light in the wavelength region explored, while the non-exposed region is transparent from 350 nm on; the average film thickness is of 410 nm and its roughness is about 120 nm. A PDMS microfluidic device has been realized and tested in order to prove the effectiveness of designed photomasks used with the common UV light box.

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Section: Open Accessmentioning

confidence: 99%

Photomasks Fabrication Based on Optical Reduction for Microfluidic Applications

et al. 2013

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“…6,7 This catoptric system is completely achromatic since no refraction is involved. These properties made the Offner imaging system successfully utilized in the fields of optical lithography, 8 telescope, 9 and imaging spectrometer. 10 When a conventional Offner imaging system is tilted relative to the sample plane, only a small region of plane is in focus.…”

Section: Introductionmentioning

confidence: 99%

Rotatable Offner imaging system for ellipsometric measurement

Jin

Tanaka

Kondoh

et al. 2017

Review of Scientific Instruments

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To realize high spatial resolution imaging ellipsometric measurement with large field of view, we developed a rotatable Offner system with unit magnification. When the conventional Offner imaging system is tilted relative to the sample plane for the ellipsometric measurement, only a small region of plane is in focus. The rotatable Offner system developed here renders the entire object in focus through all rotations. The performance of the prototype of the Offner system and imaging ellipsometer is tested by generating maps of the ellipsometric parameters Δ and Ψ for samples such as a silicon wafer and a resolution target made of chromium film evaporated on a glass substrate.

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“…For example, tracing rays through a 30-element lithographic lens will show an extremely smooth flow of rays. 2 Optical design experts recognize how a smooth flow of rays, with bulge and waist constructions, is crucial to minimizing aberrations. In practice, observing ray trajectories and relating the information to system performance is the foundation of optical system design.…”

Section: Introductionmentioning

confidence: 99%

3D visualization of optical ray aberration and its broadcasting to smartphones by ray aberration generator

Hellman

Bosset

Ender

et al. 2017

International Optical Design Conference 2017

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The ray formalism is critical to understanding light propagation, yet current pedagogy relies on inadequate 2D representations. We present a system in which real light rays are visualized through an optical system by using a collimated laser bundle of light and a fog chamber. Implementation for remote and immersive access is enabled by leveraging a commercially available 3D viewer and gesture-based remote controlling of the tool via bi-directional communication over the Internet.

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Optical lithography: 40 years and holding

Cited by 64 publications

References 11 publications

Photomasks Fabrication Based on Optical Reduction for Microfluidic Applications

Photomasks Fabrication Based on Optical Reduction for Microfluidic Applications

Rotatable Offner imaging system for ellipsometric measurement

3D visualization of optical ray aberration and its broadcasting to smartphones by ray aberration generator

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