1999
DOI: 10.1063/1.123407
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Optical losses in plasma-etched AlGaAs microresonators using reflection spectroscopy

Abstract: The optical losses in dry-etched monolithic microresonators have been studied as a function of their lateral dimensions. Cylindrical microresonators with various radii have been etched from a planar GaAlAs/GaAs microcavity with a very high quality factor (Q≅11 700). Measurements of the resonance linewidth, using Ti-sapphire laser spectroscopy allowed to study the degradation of the Q factor at small radii. The Q factor is four times smaller in 1.1 μm radius microresonators, compared to the unprocessed cavity. … Show more

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Cited by 59 publications
(49 citation statements)
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“…[3][4][5][6] In addition, investigations on submicron-diameter micropillars have shown an oscillatory variation in the Q factor in agreement with theoretical predictions. [7][8][9] In this submicron-diameter regime the oscillations of the Q factor are related to the existence of a propagating Bloch mode providing an efficient route of energy transfer between the dominant HE and EH modes of the microcavity.…”
supporting
confidence: 60%
“…[3][4][5][6] In addition, investigations on submicron-diameter micropillars have shown an oscillatory variation in the Q factor in agreement with theoretical predictions. [7][8][9] In this submicron-diameter regime the oscillations of the Q factor are related to the existence of a propagating Bloch mode providing an efficient route of energy transfer between the dominant HE and EH modes of the microcavity.…”
supporting
confidence: 60%
“…2(d)] . These observations nicely reflect that emission from off-resonant QDs is suppressed in axial direction by the cavity's stopband and that lateral losses are of minor importance for large diameter micropillars [34]. The situation differs strongly for the micropillar with d c = 2.0 μm for which significant lateral losses lead to a pronounced contribution of the cavity mode also in lateral emission (c).…”
Section: A Diameter Dependence Of Lateral Emissionmentioning
confidence: 58%
“…|E(d)| is the electrical field of the fundamental mode at the sidewalls of the micropillar, whose profile is given by the Bessel function of the first kind J 0 [28]. The parameter ε is a parameter quantifying the etching quality.…”
Section: B Optimization Of the Cavitymentioning
confidence: 99%