Optical MEMS accelerometer sensor relying on a micro‐ring resonator and an elliptical disk

Shotorban, Ali Kazemi Nasaban; Jafari, Kian; Abedi, Kambiz

doi:10.1049/iet-cds.2019.0029

Cited by 16 publications

(3 citation statements)

References 30 publications

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“…By measuring the spectrum, the corresponding physical quantities can be sensed. Since the introduction of the membrane-type EFPI [6] in the 1970s, various structures based on microelectromechanical systems (MEMS) [7][8][9] lithography and solution-etching methods have been proposed, using a collimating capillary structure [10]. Moreover, with the recent research on photonic crystal fibers [7,11], the structure of the resonant cavity has become more flexible and the performance has become even more excellent.…”

Section: Introductionmentioning

confidence: 99%

Five-Step Phase-Shift-Based Multiwavelength Averaging for Extrinsic Fabry–Perot Interferometric Sensors

Liu,

Yao,

Xia

et al. 2023

Photonics

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In order to address issues such as low demodulation accuracy, large demodulation errors, small dynamic range, and complex algorithms for the extrinsic Fabry–Perot interferometric (EFPI) sensor, a five-step phase-shift algorithm based on a multiwavelength (MW)-averaging method is proposed to improve demodulation speed, noise stability, dynamic range, and noise suppression. The proposed demodulation method utilizes white-light interferometry (WLI) technology to acquire the reflection spectra and extract the five-step phase-shift signals at Ns consecutive operating points. The demodulation results of Ns sets of five-step phase-shift signals are averaged to obtain the average demodulated phase and cavity length variation. Theoretical analysis demonstrates the significant effects of the MW demodulation method on demodulation parameter errors and noise suppression. Particularly, when the demodulation parameter θ = π/2 rad, the method exhibits excellent stability against demodulation parameter error-induced instability. Moreover, it greatly improves noise suppression and reduces noise fluctuations. Numerical simulations are conducted to validate the performance of the proposed demodulation method. Compared with the traditional single-wavelength (SW) five-step phase-shifting demodulation method, the MW demodulation method exhibits stronger noise- and harmonic-suppression capabilities as the number of averaging wavelengths Ns increases. The harmonic distortion of the MW demodulation method with Ns = 128 is 20 dB lower than that of the SW demodulation method, and the noise is 15 dB lower. Furthermore, the proposed method effectively suppresses the influence of demodulation parameter errors on signal demodulation. This proposed demodulation method has the potential for fast real-time dynamic demodulation. It has great significance and application in the field of weak signal detection in fiber-optic sensors with interferometer structures and has enormous advantages in noise-suppression in complex environments.

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Section: Introductionmentioning

confidence: 99%

Five-Step Phase-Shift-Based Multiwavelength Averaging for Extrinsic Fabry–Perot Interferometric Sensors

Liu,

Yao,

Xia

et al. 2023

Photonics

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“…The typical resolving power of a high resolving benchtop spectrometer is about 0.05 nm. As the sensitivity of the accelerometer is only 0.0025 nm/G shift in wavelength, the estimated resolution of this setup is about 20 G [ 20 ]. This device is simple in fabrication and assembly.…”

Section: Introductionmentioning

confidence: 99%

Design and Modeling of Fiber-Free Optical MEMS Accelerometer Enabling 3D Measurements

2022

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Optical accelerometers are popular in some applications because of their better immunity to electromagnetic interference, and they are often more sensitive than other accelerometer types. Optical fibers were employed in most previous generations, making micro-fabrication problematic. The optical accelerometers that are suitable for mass manufacture and previously mentioned in the literature have various problems and are only sensitive in one direction (1D). This study presents a novel optical accelerometer that provides 3D measurements while maintaining simple hybrid fabrication compatible with mass production. The operating concept is based on a power change method that allows for measurements without the need for complex digital signal processing (DSP). Springs hold the proof mass between a light-emitting diode and a quadrant photo-detector, allowing the proof mass to move along three axes. Depending on the magnitude and direction of the acceleration affecting the system, the proof mass moves by a certain amount in the corresponding axis, causing some quadrants of the quadrant detector to receive more light than other quadrants. This article covers the design, implementation, mechanical simulation, and optical modeling of the accelerometer. Several designs have been presented and compared. The best simulated mechanical sensitivity reaches 3.7 μm/G, while the calculated overall sensitivity and resolution of the chosen accelerometer is up to 156 μA/G and 56.2 μG, respectively.

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“…Optical micro-resonators are highly sensitive to the external environment and stimuli. They can detect small variations of the pressure, temperature, acceleration, index of refraction, etc., by measuring the change of the optical resonance. The change can be the shift of the resonant wavelengths and the splitting or broadening of the resonant peaks.…”

Section: Iintroductionmentioning

confidence: 99%

Mid-Infrared Serial Microring Resonator Array for Real-Time Detection of Vapor-Phase Volatile Organic Compounds

Zhou

Husseini

et al. 2022

Anal. Chem.

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Chip-scale infrared spectrometers consisting of a microring resonator array (MRA) were developed for volatile organic compound (VOC) detection. The MRA is serially positioned to serve as a wavelength sorting element that enables wavelength demultiplexing. Unlike conventional devices operated by a single microring, our MRA can perform multiwavelength mid-infrared (mid-IR) sensing by routing the resonant wavelength light from a broadband mid-IR source into different sensing channels. Miniaturized spectrometer devices were fabricated on mid-IR transparent silicon-rich silicon nitride (SiN x ) thin films through complementary metal–oxide-semiconductor (CMOS) processes, thus enabling wafer-level manufacturing and packaging. The spectral distribution of the resonance lines and the optimization of the microring structures were designed using finite-difference time-domain (FDTD) modeling and then verified by laser spectrum scanning. Using small microring structures, the spectrum showed a large free spectral range (FSR) of 100 nm and held four spectral channels without crosstalk. Unlike near-infrared microrings using refractive index sensing, our MRA can detect hexane and ethanol vapor pulses by monitoring the intensity variation at their characteristic mid-IR absorption bands, thus providing high specificity. Applying multiwavelength detection, the sensor module can discriminate among various VOC vapors. Hence, our mid-IR MRA could be an essential component to achieve a compact spectroscopic sensing module that has the potential for applications such as remote environmental monitoring and portable health care devices.

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Optical MEMS accelerometer sensor relying on a micro‐ring resonator and an elliptical disk

Cited by 16 publications

References 30 publications

Five-Step Phase-Shift-Based Multiwavelength Averaging for Extrinsic Fabry–Perot Interferometric Sensors

Five-Step Phase-Shift-Based Multiwavelength Averaging for Extrinsic Fabry–Perot Interferometric Sensors

Design and Modeling of Fiber-Free Optical MEMS Accelerometer Enabling 3D Measurements

Mid-Infrared Serial Microring Resonator Array for Real-Time Detection of Vapor-Phase Volatile Organic Compounds

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