Optical MEMS Pressure Sensors Incorporating Dual Waveguide Bragg Gratings on Diaphragms

Neeharika, Vellaluru; Pattnaik, Prasant Kumar

doi:10.1109/jsen.2015.2482944

Cited by 28 publications

(8 citation statements)

References 10 publications

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“…In addition, the FBG pressure sensor’s strong antielectromagnetic interference capability and great safety are a result of its usage of optical signals for sensing. It is appropriate for pressure monitoring in areas with severe electromagnetic interference or dangerous conditions, such as the aircraft, 5 , 6 oil wells, 7 – 9 and pipelines 10 – 14 In addition, FBG pressure sensors have been implemented in biological domains, such as blood pressure monitoring, 15 – 17 sleep quality monitoring, 18 and plantar pressure monitoring, 19 – 23 among others.…”

Section: Introductionmentioning

confidence: 99%

Fiber Bragg grating pressure sensors: a review

Wang

et al. 2023

Opt. Eng.

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Fiber Bragg grating (FBG) pressure sensors have the potential to replace conventional voltage sensors due to their compact size, resistance to electromagnetic interference, excellent safety, distributed sensing, and numerous other intrinsic benefits. It is frequently employed in the domains of civil engineering, aerospace, and medicine. Our work examines two types of sensitized FBG pressure sensors, namely FBG pressure sensors with innately improved sensitivity and FBG pressure sensors with extrinsically increased sensitivity. Our work examines microstructured fiber Bragg grating pressure sensors and polymer fiber Bragg grating pressure sensors for FBG pressure sensors with innately heightened sensitivity. Our research examines metal-mechanical FBG pressure sensors and polymer-mechanical FBG pressure sensors for extrinsically sensitized FBG pressure sensors. This report also summarizes the benefits and drawbacks of various FBG pressure sensors and temperature compensation techniques. Finally, the future of FBG pressure sensors is examined.

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Section: Introductionmentioning

confidence: 99%

Fiber Bragg grating pressure sensors: a review

Wang

et al. 2023

Opt. Eng.

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“…Other pressure sensors are also available in the literature, like acoustics-based pressure sensors using surface acoustic wave (SAW) filters (Ren et al , 2016; Xie et al , 2018; Muller et al , 2017). Optical pressure sensors are also available abundantly in the literature (Neeharika and Pattnaik, 2016; Jun et al , 2012).…”

Section: Introductionmentioning

confidence: 99%

Fabrication and testing of a Hall effect based pressure sensor

Paliwal

Yenuganti

Manuvinakurake

2022

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Purpose This paper aims to present the fabrication and testing of a pressure sensor integrated with Hall effect sensors and permanent magnets arranged in two configurations to measure pressure in the range of 0–1 bar. The sensor is fabricated using stainless steel (SS) and can be used in high-temperature and highly corrosive environments. The fabricated sensor is of low cost, self-packaged and the differential arrangement helps in compensating for any ambient temperature variations. Design/methodology/approach The sensor deflects of a circular diaphragm with a simple rigid mechanical structure to convert the applied pressure to a Hall voltage output. Two sensor designs are proposed with a single pair of Hall sensors and magnets and a differential configuration with two Hall sensors and magnets. Two sensor designs are designed, fabricated and tested for their input–output characteristics and the results are compared. Findings The fabricated sensors are calibrated for 25 cycles of ascending and descending pressure in steps of 0.1 bar. Various static characteristics like nonlinearity, hysteresis and % error are estimated for both the sensor designs and compared with the existing Hall effect based pressure sensors. The differential arrangement design was found to have better characteristics as compared to the other design from the experimental data. Originality/value This paper focuses on fabricating and testing a novel differential Hall effect based pressure sensor. The differential arrangement of the sensor aids in the compensation of ambient temperature variations and the use of SS enables the sensor in high-temperature and highly corrosive applications. The proposed sensor is low cost, simple and self-packaged, and found to have high repeatability and good linearity compared to other similar Hall effect based pressure sensors available in the literature.

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“…The transducer placed on the contact surface across the body can also impose artificially high pressures on the tissues and poor resolution due to the thickness of the transducer [15,16]. As an alternative to the electric sensor, the optical sensor has provided good durability and external noise immunity [17,18,19]. Some device measured the pressure distribution for foot plantar using optic fiber [20].…”

Section: Introductionmentioning

confidence: 99%

Active Body Pressure Relief System with Time-of-Flight Optical Pressure Sensors for Pressure Ulcer Prevention

Lee

Kwon

Lee

et al. 2019

Sensors

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A body pressure relief system was newly developed with optical pressure sensors for pressure ulcer prevention. Unlike a conventional alternating pressure air mattress (APAM), this system automatically regulates air flow into a body supporting mattress with adaptive inflation (or deflation) duration in response to the pressure level in order to reduce skin stress due to prolonged high pressures. The system continuously quantifies the body pressure distribution using time-of-flight (ToF) optical sensors. The proposed pressure sensor, a ToF optical sensor in the air-filled cell, measures changes in surface height of mattress when pressed under body weight, thereby indirectly indicating the interface pressure. Non-contact measurement of optical sensor usually improves the durability and repeatability of the system. The pressure sensor was successfully identified the 4 different-predefined postures, and quantitatively measured the body pressure distribution of them. Duty cycle of switches in solenoid valves was adjusted to 0–50% for pressure relief, which shows that the interface pressure was lower than 32 mmHg for pressure ulcer prevention.

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Optical MEMS Pressure Sensors Incorporating Dual Waveguide Bragg Gratings on Diaphragms

Cited by 28 publications

References 10 publications

Fiber Bragg grating pressure sensors: a review

Fiber Bragg grating pressure sensors: a review

Fabrication and testing of a Hall effect based pressure sensor

Active Body Pressure Relief System with Time-of-Flight Optical Pressure Sensors for Pressure Ulcer Prevention

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