Optical modeling and investigation of thin films based on plasma-polymerized HMDSO under oxygen flow deposited by PECVD

Amri, R.; Hamed, Zied Ben; Gamra, D.; Lejeune, M.; Bouchriha, H.

doi:10.1007/s10854-023-10749-4

J Mater Sci: Mater Electron

2023

DOI: 10.1007/s10854-023-10749-4

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Optical modeling and investigation of thin films based on plasma-polymerized HMDSO under oxygen flow deposited by PECVD

R. Amri

Zied Ben Hamed

D. Gamra

et al.

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2024

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Cited by 2 publications

References 47 publications

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Determination of Optical and Structural Parameters of Thin Films with Differently Rough Boundaries

Ohlídal,

Vohánka,

Dvořák

et al. 2024

Coatings

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The optical characterization of non-absorbing, homogeneous, isotropic polymer-like thin films with correlated, differently rough boundaries is essential in optimizing their performance in various applications. A central aim of this study is to derive the general formulae necessary for the characterization of such films. The applicability of this theory is illustrated through the characterization of a polymer-like thin film deposited by plasma-enhanced chemical vapor deposition onto a silicon substrate with a randomly rough surface, focusing on the analysis of its rough boundaries over a wide range of spatial frequencies. The method is based on processing experimental data obtained using variable-angle spectroscopic ellipsometry and spectroscopic reflectometry. The transition layer is considered at the lower boundary of the polymer-like thin film. The spectral dependencies of the optical constants of the polymer-like thin film and the transition layer are determined using the Campi–Coriasso dispersion model. The reflectance data are processed using a combination of Rayleigh–Rice theory and scalar diffraction theory in the near-infrared and visible spectral ranges, while scalar diffraction theory is used for the processing of reflectance data within the ultraviolet range. Rayleigh–Rice theory alone is sufficient for the processing of the ellipsometric data across the entire spectral range. We accurately determine the thicknesses of the polymer-like thin film and the transition layer, as well as the roughness parameters of both boundaries, with the root mean square (rms) values cross-validated using atomic force microscopy. Notably, the rms values derived from optical measurements and atomic force microscopy show excellent agreement. These findings confirm the reliability of the optical method for the detailed characterization of thin films with differently rough boundaries, supporting the applicability of the proposed method in high-precision film analysis.

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Determination of Optical and Structural Parameters of Thin Films with Differently Rough Boundaries

Ohlídal,

Vohánka,

Dvořák

et al. 2024

Coatings

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Low-Cost Optical Filters Based on SiOxCy:H and Ag Thin Films Fabricated by Plasma Enhanced Chemical Vapor Deposition and Sputtering

Kotbi,

Lejeune,

Barroy

et al. 2024

Photonics

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Hexamethyldisiloxane (HMDSO) is an organosilicon compound with a modifiable bandgap, depending on the deposition conditions. This material has many unique properties due to its stability, low toxicity, and strong adhesion, making it useful as a protective barrier against corrosion, moisture, and oxidation. In this work, HMDSO films were deposited on glass substrates by the Plasma Enhanced Chemical Vapor Deposition (PECVD) technique at different deposition times. The optical properties of HMDSO films, such as dielectric permittivity, refractive index, extinction and absorption coefficients, and band gap energy, are inferred from transmission and reflection spectra. As the deposition time increased, the real part of the dielectric constant, the refractive index, and the bandgap energy showed a decrease, dropping from 4.24 to 3.40, from 2.06 to 1.84, and from 2.85 eV to 2.03 eV, respectively. The latter result is determined using classical models such as the O’Leary-Johnson-Lim (‘OJL’) interband transition and the harmonic oscillator model. HMDSO and Silver are used in this study for the fabrication of optical filters using two types of structures, a multiple cavity metal–dielectric (MCMD) and the Fabry–Perot structure. The silver layers are deposited by a sputtering process. The MCMD optical filter shows a higher transmittance of about 30%, but a wide range of wavelengths is transmitted. In contrast, the Fabry–Perot filter showed high contrast but a lower transmittance of about 20%.

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Optical modeling and investigation of thin films based on plasma-polymerized HMDSO under oxygen flow deposited by PECVD

Cited by 2 publications

References 47 publications

Determination of Optical and Structural Parameters of Thin Films with Differently Rough Boundaries

Determination of Optical and Structural Parameters of Thin Films with Differently Rough Boundaries

Low-Cost Optical Filters Based on SiOxCy:H and Ag Thin Films Fabricated by Plasma Enhanced Chemical Vapor Deposition and Sputtering

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