2010
DOI: 10.1109/jlt.2010.2080258
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Optical Performance of Bragg Gratings Fabricated in Ti:LiNbO$_3$ Waveguides by Focused Ion Beam Milling

Abstract: In this paper we propose an efficient technique for micromachining lithium niobate that is used in Ti-diffused waveguides. The use of Focused Ion Beam (FIB) etching allows obtaining homogeneous periodic microstructures. Bragg gratings with a period of 1.05 m and an aspect ratio of 6:1 (depth-to-half period ratio) have been achieved. A reflectivity greater than 95% associated with a bandwidth at half maximum of about 100 nm within a window centered at 1550 nm, is demonstrated for a Bragg grating of period 3=18 … Show more

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Cited by 9 publications
(17 citation statements)
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“…Then, we proceeded to the experimental measurements (see setup depicted in section III), in order to compare the theoretical results and measurements of B.G obtained by Focused Ion Beam (FIB) etching of a Ti:LiNbO 3 waveguide. The obtained experimental results are in good accordance with those theoretically predicted [14]. Figure 1 shows a representation of the studied model where an index corrugation is engraved inside a waveguide whose index is n 2 and width is d. Index modulation is characterized by a depth l, a period Λ and a duty cycle r = W Λ .…”
Section: Introductionsupporting
confidence: 84%
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“…Then, we proceeded to the experimental measurements (see setup depicted in section III), in order to compare the theoretical results and measurements of B.G obtained by Focused Ion Beam (FIB) etching of a Ti:LiNbO 3 waveguide. The obtained experimental results are in good accordance with those theoretically predicted [14]. Figure 1 shows a representation of the studied model where an index corrugation is engraved inside a waveguide whose index is n 2 and width is d. Index modulation is characterized by a depth l, a period Λ and a duty cycle r = W Λ .…”
Section: Introductionsupporting
confidence: 84%
“…This technique of engraving is of an ionic type, it is realized step by step, period by period. The B.G obtained by FIB technique is presented in [14,19]. This B.G.…”
Section: Waveguides and Bg Fabricationmentioning
confidence: 99%
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