Optical properties and band gap characterization of high dielectric constant oxides

Growth of (Sr,La)-(Ta,Ti)-O-N perovskite oxide and oxynitride films by radio frequency magnetron sputtering: Influence of the reactive atmosphere on the film structure

“…All studies involving these materials as thin films concern depositions on metallized-SiO 2 /Si substrates and mainly for a use as high-κ gate dielectric. Fursenko reported a band-gap value (E g ¼4.6 eV) close to ours, for an amorphous film deposited by atomic vapor deposition on TiN/Si(001) substrate [23]. Sr 2 Ta 2 O 7 films have been obtained by Kim [17], Okuwada [18] and Kato [19] by chemical route depositions on Pt-SiO 2 /Si substrates.…”

“…The influence of the reactive gas on the structural, morphological and optical characteristics was investigated. Since the targeted composition is not reported in literature, our work is compared to the deposition of related compounds: Sr 2 (Ta,Nb) 2 O 7 deposited by chemical route [17], Sr 2 Ta 2 O 7 elaborated by chemical route [18][19][20] or atomic vapor deposition [21][22][23] and SrTaO 2 N thin films deposited by nitrogen-plasma assisted pulsed laser deposition [24]. In the present study, films were deposited on single crystalline (0 0 1)MgO substrate.…”

High dielectric constant and capacitance in ultrasmall (2.5 nm) SrHfO3 perovskite nanoparticles produced in a low temperature non-aqueous sol–gel route

“…52,53 Literature data are contrasting regarding the type of SrHfO 3 transition: some authors report it to be directly allowed, 54 others that it is an indirectly allowed transition. 55 Hence, in this work, both cases were considered. Raman spectra were measured at room temperature using a micro-Raman spectrometer (Horiba Jobin Vyon) with a 633 nm excitation laser, an edge lter for Rayleigh line rejection, and a CCD detector.…”

Plasma-Assisted Atomic Layer Deposition of SrTiO3: Stoichiometry and Crystallinity Studied by Spectroscopic Ellipsometry

“…The bandgap value corresponds to the intercept value of this line with the horizontal axis. 37,38 This procedure for the determination of E g is illustrated in the inset of Figure 5b ) ratio for samples which were analyzed by RBS. The figure clearly shows that the film composition can also be estimated by probing the refractive index and/or the bandgap of the deposited film.…”