1999 IEEE LEOS Annual Meeting Conference Proceedings. LEOS'99. 12th Annual Meeting. IEEE Lasers and Electro-Optics Society 1999
DOI: 10.1109/leos.1999.813607
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Optical properties of Al/sub x/Ga/sub 1-x/As heterostructure native oxide planar waveguides

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“…However some researchers have been successful in making native-oxide waveguides on III-V materials. For example, Luo et al [82] fabricated wet thermal native oxide layers on GaAlAs and used prism coupling measurements to study the dependence of the refractive index on aluminum concentration. They found that a sufficient Δn was produced to support waveguiding in the oxide layer.…”
Section: Oxidationmentioning
confidence: 99%
“…However some researchers have been successful in making native-oxide waveguides on III-V materials. For example, Luo et al [82] fabricated wet thermal native oxide layers on GaAlAs and used prism coupling measurements to study the dependence of the refractive index on aluminum concentration. They found that a sufficient Δn was produced to support waveguiding in the oxide layer.…”
Section: Oxidationmentioning
confidence: 99%