Optical properties of amorphous carbon, deposited by an ion-plating technique

Stenzel, Olaf; Rau, B.; Schaarschmidt, G.

doi:10.1002/pssa.2211150259

Cited by 9 publications

(2 citation statements)

References 4 publications

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“…[1][2][3][4] Such films generally have an amorphous structure, in which sp 1 , sp 2 , and sp 3 bonds coexist. 5 6 In DLC or a-C materials, these bondings determine the optical, electronic, and mechanical properties.…”

Section: Introductionmentioning

confidence: 99%

Electrical and Optical Properties of Si-Incorporated a-C:H Films via the Radio Frequency Plasma-Enhanced Chemical Vapor Deposition Method

Kim¹,

Choi²,

Hong³

2016

j nanosci nanotechnol

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The optical and electrical properties of silicon-incorporated hydrogenated amorphous carbon (a-C:H:Si) films deposited via the radio frequency (RF) plasma-enhanced chemical vapor deposition (PECVD) method using a mixture of CH4, H2, and SiH4 were observed. The silane gas whose ranged from 0 to 25 vol.% [SiH4/(SiH4 + CH4) was fed into the reactor while the other deposition parameters were kept constant. The basic properties of these films were investigated via Raman spectroscopy, UV-visible spectrometry, I-V measurement, and surface profiling. The experiment results showed that the film thickness increased from 300 nm to 800 nm for the same deposition time as the silane gas increased. The Raman spectrum obtained from the silicon-incorporated a-C:H films suggested that the film property changed from graphitic-like to more diamond-like. As the silane gas increased, the optical gap, E04, slightly increased from 1.98 eV to 2.62 eV. It was shown that the Si atoms incorporated into the a-C:H films reduced the size of the sp2 clusters. As for the I-V characteristics, the Si-incorporated a-C:H films had a lower leakage current than the a-C:H films without Si.

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Section: Introductionmentioning

confidence: 99%

Electrical and Optical Properties of Si-Incorporated a-C:H Films via the Radio Frequency Plasma-Enhanced Chemical Vapor Deposition Method

Kim¹,

Choi²,

Hong³

2016

j nanosci nanotechnol

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“…[3][4][5][6][7][8] In particular, Enke 2 reported that machining tools coated with DLC films for high speed drilling and thread cutting of steel gave endurances of up to 17 times those of uncoated tools. [3][4][5][6][7][8] In particular, Enke 2 reported that machining tools coated with DLC films for high speed drilling and thread cutting of steel gave endurances of up to 17 times those of uncoated tools.…”

Section: Introductionmentioning

confidence: 99%

Improved productivity on diamond-like carbon coating optical disk stamper

Ueng

Guo

2003

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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The study on the effect of erbium on diamond-like carbon deposited by pulsed laser deposition techniqueWe report on a proposed process for depositing a diamond-like carbon ͑DLC͒ film on the back surface of a submaster stamper after a nickel electroforming process. This process could keep friction low and improve the productivity of an optical disk. Hydrogenated amorphous carbon films were deposited from a mixture of argon and acetylene by electron cyclotron resonance-chemical vapor deposition at pressures of about 5 -9ϫ10 Ϫ3 mbar. In order to improve the adhesion strength of DLC films, functionally gradient Ti/TiN/TiCN supporting mutilayers were deposited on the stampers. The structural characteristics of DLC films were investigated by Raman spectroscopy. The properties of a DLC film coating on a stamper are summarized as follows: microhardness ͑five times improved͒, roughness less than 4 nm, excellent adhesion of 65 N, and coefficients of friction less than 0.1. The characteristics of the back surface coated by DLC film were improved, and the productivity of an optical disk per stamper is estimated at about 1.7 times more than obtained. Finally, the DLC submaster stamper could be used to overcome the barrier and dramatically improve the economics and yield of increased productivity of polymer compact disks.

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