Electrolysis of water has been implemented to inject hydrogen into the SrTiO 3 single crystal doped with 1 wt % of Nb. Direct evidence of OH Ϫ group formation in the Nb:SrTiO 3 single crystal has been obtained by Fourier-transform infrared ͑FTIR͒ analysis, showing an intensity increase of the absorption at a wave number of about 3500 cm Ϫ1 . FTIR analysis also revealed lattice relaxation due to hydrogen doping. High-resolution x-ray diffraction ͑XRD͒ analysis further illustrated lattice expansion, as evidenced by the left shift of the SrTiO 3 ͑200͒ peak for the hydrogen doped sample. The decrease in the XRD rocking curve linewidth of this ͑200͒ peak for the hydrogen-doped sample suggested that hydrogen doping relaxed the local constraints in the crystal. In contrast to the usual great increase in conductivity of insulating perovskite oxides by hydrogen doping, an obvious decrease in conductivity of the highly conductive Nb:SrTiO 3 single crystal was observed after hydrogen doping. In recent years, much attention has been paid to the reactions and impact of hydrogen on perovskite ferroelectric oxides. Even though perovskite oxides are widely used in ceramic capacitors and piezoelectric devices, the reaction between hydrogen and (Ba,Sr)TiO 3 or Pb(Zr,Ti)O 3 thin film capacitors during forming gas annealing ͑FGA͒ and the consequent degradation is a major obstacle to their integration as nonvolatile memories in complementary metal-oxidesemiconductor based devices. 1,2 Chen and co-workers recently found that the ambient temperature reaction of atomic hydrogen generated by electrolysis of water causes serious problems of reliability in (Ba,Sr)TiO 3 and Pb(Zr,Ti)O 3 . 3,4 To date, extensive studies have been carried out to determine the mechanism of FGA degradation and the following fairly clear picture has been obtained: hydrogen incorporated into perovskite lattice as a shallow donor results in a great increase in leakage currents and an obvious depression in polarization. However, fundamental studies and in-depth understanding of the ambient-temperature reaction between atomic hydrogen and perovskite oxides are still limited.In this letter, we report direct evidence of the ambienttemperature incorporation of hydrogen in Nb doped SrTiO 3 single crystals (Nb:SrTiO 3 ) and its impact on the conductivity and structure of the crystals. SrTiO 3 is a typical perovskite oxide. Its single crystals are widely used as a substrate or buffer layer for ferroelectric films and high-T c superconducting films deposition, due to their similarities in structure. Nb:SrTiO 3 single crystals are especially attractive as they are highly conductive and therefore can be simultaneously used as substrate and bottom electrode material for the growth of ferroelectric films. Their high conductivity is also very useful for the present investigation. In studies of dielectric ceramics, metal electrodes usually have to be used in electrolysis of water experiments. The electrode effect, particularly the interface effect, may sometimes shadow what hap...