Optical properties of LPCVD silicon oxynitride

Growth and characterization of SiON thin films by using thermal-CVD machine

“…These peaks are well consistent with those reported by others [12,22,23,[27][28][29]. The symmetrical stretching vibrational resonance peak assigned at 1449.98 cm À1 and 1592.86 cm À1 is associated with O@N bond [22].…”

“…In spite of above bands, absorption stretch Si-OH band at 928.4 cm À1 , a broad Si-OH band around 3664.5 cm À1 [31] and a dominant intense band centered at 2337.6 cm À1 indicating the presence of Si-H stretching quasi phonon modes [22,27] have been also detected. On increasing the deposition temperature a slight increase in Si-H and a slight decrease in Si-OH bond have been observed.…”

“…direct PECVD system at low temperature and used these films for the fabrication of ridge type optical waveguides. The optical properties of LPCVD deposited SiON films have been studied by Modreanu et al [22]. The effect of deposition temperature on the physical properties of SiON films deposited by electron cyclotron resonance plasma technique has been studied by del Prado et al [23].…”

Heating/melting of a semitransparent particle including radiation effects

“…Complex index of refraction (m λ = n λ − ik λ ) data are taken from Palik (0.6 nm-500 µm) [14] and Khashan and Nassif (0.2 µm-3.0 µm) [15]. It is recognized that the refractive index depends on temperature as described in the literature [19][20][21]. However, since the available data are lacking and for simplifying the computations, the index of refraction is assumed to be independent of temperature in the numerical calculations.…”

Heating/melting of a fused silica particle by convection and radiation

“…Complex index of refraction (m k = n k À ik k ) data are taken from Palik (0.6 nm-500 lm) [17] and Kashan and Nassif (0.2 lm-3.0 lm) [18]. It is recognized that the refractive index is dependent on temperature as described in the literature [19][20][21]. However, since the available data are lacking and for simplifying the computation, the index of refraction is assumed to be independent of temperature in the numerical calculations.…”