Optical properties of silicon microcolumn grown by nanosecond pulsed laser irradiation

Yaddadene, Chafiaa; Djemaa, A.; Belaroussi, Y.; Kerdja, T.; Gabouze, N.; Keffous, A.; Guerbous, L.

doi:10.1016/j.optcom.2011.03.004

Cited by 11 publications

(3 citation statements)

References 23 publications

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“…The laser irradiation creates some regular self-organizing microstructures on the surface, indicating significant optical/electrical properties. One of the useful optical properties of the microstructures is the reduction of the surface reflection for a large spectral range [4][5][6][7][8].…”

Section: Introductionmentioning

confidence: 99%

Analysis of Surface Texturing of Silicon with Surface Regular Microstructure Using C Method

et al. 2022

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Silicon, as the most abundant element in the earth’s crust and the most common material used in electronic and optical equipment, has attracted the attention of many individuals to change the properties of this material, improving its electronic and optical properties. One of these efforts relies on the reduction of surface reflection by making use of different methods. However, among them, the use of lasers in creating surface microstructures has been of special importance because there is no need for masks and other additional materials. In this work, a theoretical method is utilized to analyze these textures with the theorem of diffraction grating on a micrometer scale. The surface reflection of the microstructure created by excimer laser exposure on a silicon surface is simulated. The theoretical Coordinate transformation method (C method) gives out notable results against the experimental records by approximating triangular and trapezoidal microstructures. The model is useful for predicting the reflective response of the modified microstructural morphology. One of the main applications is the texturing of the solar cell front faces to enhance their efficiency, mainly due to photon trapping.

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Section: Introductionmentioning

confidence: 99%

Analysis of Surface Texturing of Silicon with Surface Regular Microstructure Using C Method

et al. 2022

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“…In the past, it has been found that surface texturing can reduce the surface reflection of light and increase absorption. The nanosecond [10][11][12] and picosecond 13,14 laser processing are common for using focused laser beams irradiated on silicon surface directly in the presence of certain reactive halide gases. 1,2 Black silicon has been proved to have excellent antireflection property, and the absorbance from the near ultraviolet (UV) to the near infrared (NIR) 3,4 has increased over 90%.…”

Section: Introductionmentioning

confidence: 99%

Periodic antireflection surface structure fabricated on silicon by four-beam laser interference lithography

Zhang¹,

Wang²,

Wang³

et al. 2013

Journal of Laser Applications

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Silicon surface structures with excellent antireflection property arouse wide interest. Chemical and physical methods such as femtosecond, nanosecond, and picosecond laser processing, wet-chemical etching, electrochemical etching, and reactive ion etching have been developed to fabricate them. However, the methods can only produce a quasi-ordered array of sharp conical microspikes on silicon surface. In this paper, we present a method to fabricate periodic silicon antireflection surface structures using direct four-beam laser interference lithography (LIL). With 1 atm ambient atmosphere of SF 6 and the laser fluence of the four beams irradiated on the silicon surface at 0.64 J cm À2 , the periodical conical spikes were generated. Changing the polarization directions of the opposite incident beam pairs in a four-beam LIL system could convert conical spikes structure into an array of holes. Antireflection in a wide spectral range was measured by a spectrophotometer from ultraviolet to near-infrared. The average reflectance of this periodic black silicon surface is less than 3.5%.

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“…Az alkalmazott impulzushosszak a nanoszekundumos vagy a szubpikoszekundumos tartományba esnek [6,10]. A kísérletekhez Nd:YAG [11,12], nanoszekundumos excimer [13,14,15], szubpikoszekundumos excimer [16], és femtoszekundumos lézereket [8,17,18] használtak.…”

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Optical properties of silicon microcolumn grown by nanosecond pulsed laser irradiation

Cited by 11 publications

References 23 publications

Analysis of Surface Texturing of Silicon with Surface Regular Microstructure Using C Method

Analysis of Surface Texturing of Silicon with Surface Regular Microstructure Using C Method

Periodic antireflection surface structure fabricated on silicon by four-beam laser interference lithography

Lézerrel kezelt szilícium felületek, valamint impulzuslézeres rétegépítéssel előállított amorf szilícium és SixC vékonyrétegek ellipszometriai vizsgálata

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