2015
DOI: 10.3390/computation3040657
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Optical Properties of Silicon-Rich Silicon Nitride (SixNyHz) from First Principles

Abstract: Abstract:The real and imaginary parts of the complex refractive index of SixNyHz have been calculated from first principles. Optical spectra for reflectivity, absorption coefficient, energy-loss function (ELF), and refractive index were obtained. The results for Si3N4 are in agreement with the available theoretical and experimental results. To understand the electron energy loss mechanism in Si-rich silicon nitride, the influence of the Si/N ratio, the positions of the access Si atoms, and H in and on the surf… Show more

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Cited by 12 publications
(14 citation statements)
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References 30 publications
(38 reference statements)
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“…16 Lastly, a recent theoretical study calculated the dielectric function of silicon nitride using density functional theory. 95 The results were consistent with the measurements of Philipp for b-SiN-a crystalline phase of silicon nitride. The same study also examined both the effect of defects due to excess Si and the effect of hydrogen termination on the optical properties.…”
Section: Thin-film Silicon Nitride Membranessupporting
confidence: 89%
“…16 Lastly, a recent theoretical study calculated the dielectric function of silicon nitride using density functional theory. 95 The results were consistent with the measurements of Philipp for b-SiN-a crystalline phase of silicon nitride. The same study also examined both the effect of defects due to excess Si and the effect of hydrogen termination on the optical properties.…”
Section: Thin-film Silicon Nitride Membranessupporting
confidence: 89%
“…Silicon-rich nitride is widely used in the opto-electronics industry (e.g. Papet et al, 2006;Tao et al, 2015) and initially was preferred for our application due to its better mechanical properties compared with pure Si 3 N 4 (lower inherent stress and less brittle). Fig.…”
Section: Resultsmentioning
confidence: 99%
“…As first-principle calculations have been widely applied in the analysis of various physical properties [21], the effect of the Au doping concentration on the electronic structure of the MgO film was analyzed on the basis of first-principle calculations. The band structures and work functions of the undoped and Au-doped MgO crystals were calculated with the Cambridge Serial Total Energy Package simulation program.…”
Section: Methodsmentioning
confidence: 99%