2008
DOI: 10.1116/1.3013368
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Optical properties of sputtered fluorinated ethylene propylene and its application to surface-plasmon resonance sensor fabrication

Abstract: The optical properties of sputtered fluorinated ethylene propylene (FEP) thin films (100–400nm) were analyzed using spectroscopic ellipsometry. Glass (similar to BK7) and silicon substrates were used, and deposition rates on glass were found to be on average 37% higher than on silicon. Refractive indices of the deposited films at 630nm ranged from 1.379 to 1.392 on glass and from 1.381 to 1.417 on Si, which roughly corresponds to a 4.3% increase when compared to the bulk material value of 1.335. By using the o… Show more

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Cited by 6 publications
(12 citation statements)
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“…In these implementations, the refractive index of the buffer layer has to match to that of aqueous samples ͑close to 1.33 at the wavelength of = 632.8 nm͒ in order to achieve a symmetrical refractive index structure needed for the excitation of LRSPs. Up to date, fluoropolymers deposited by spincoating 10,14 or sputtering 17 and low refractive index dielectric layers such as aluminum fluoride 18 or magnesium fluoride 14 prepared by thermal evaporation were used for the construction of layer systems supporting LRSPs. In this contribution, we investigate thin gold films deposited on a Cytop fluoropolymer for the excitation of LRSPs on the surface of a SFPS biosensor.…”
Section: Introductionmentioning
confidence: 99%
“…In these implementations, the refractive index of the buffer layer has to match to that of aqueous samples ͑close to 1.33 at the wavelength of = 632.8 nm͒ in order to achieve a symmetrical refractive index structure needed for the excitation of LRSPs. Up to date, fluoropolymers deposited by spincoating 10,14 or sputtering 17 and low refractive index dielectric layers such as aluminum fluoride 18 or magnesium fluoride 14 prepared by thermal evaporation were used for the construction of layer systems supporting LRSPs. In this contribution, we investigate thin gold films deposited on a Cytop fluoropolymer for the excitation of LRSPs on the surface of a SFPS biosensor.…”
Section: Introductionmentioning
confidence: 99%
“…The smaller refractive index of CAT-CVD films indicates a presence of air in the films. The authors of [54] obtained thin films of Teflon FEP with a somewhat higher refractive index than that of the sputtered target material. This increased value of the refractive index could be caused by dense packing in the film or by inclusion into the film of impurities such as carbonized clusters and other chemical groups synthesized in the plasma at a comparatively high pressure.…”
Section: Discussionmentioning
confidence: 99%
“…It is an ideal cladding material for both PC and PSU core fibers due to: firstly, FEP is very soft (Young's modulus of FEP is 0.48 GPa [28], compared to that of silica is 70 GPa [29]), and therefore can highly increase the overall flexibility of the optical waveguide, a crucial property to achieve long-term deep tissue neuromodulation and minimize the foreign body response (FBR) [30]. Secondly, FEP has one the lowest RI within all the thermoplastics (1.34@630 nm [31]). The large RI difference between the core materials (PC, PSU) and the cladding material FEP leads to the UHNA of the POFs.…”
Section: Materials Propertiesmentioning
confidence: 99%