Solution-processed
TiO2 and other metal-oxide electron-transporting
layers (ETLs) for perovskite solar cells commonly require high-temperature
annealing (>450 °C), causing the underlying indium-tin oxide
(ITO) to degrade and inhibiting the use of flexible plastic substrates,
such as poly(ethylene naphthalate). Laser-based solar cell manufacturing
is attracting increased interest and can enable rapid and low-temperature
fabrication of perovskite solar cells. By using novel pulsed ultraviolet
laser processing on the solution-processed TiO2, we demonstrate
a champion 17.1% efficient flexible perovskite solar cell. We can
independently control the annealing of the ETL without affecting the
underlying ITO or substrate due to the shallow absorption depth and
short pulse duration of the laser. Ellipsometry and X-ray photoelectron
spectroscopy verify that the laser-annealed TiO2 thin film
is stoichiometric and relatively denser than the thermally annealed
control sample. The efficiencies of the laser-processed devices exceeded
those fabricated via hot plate, but with the added benefit of a high-throughput,
low-temperature, and flexible-substrate-friendly process.