For temperatures above ∼2500 K systematic errors arise in temperature and, depending on the algorithm used for data evaluation, in species concentration measured by Raman or Raman/Rayleigh spectroscopy. These systematic errors are independent of the specific experimental setup and excitation wavelength, but are caused by significant dissociation of the Raman active species into atoms and radicals. The aim of this paper is to develop a basic understanding of high temperature Raman/Rayleigh spectroscopy and to present a matched data post-processing. Methods are developed for an appropriate post-processing of data gained from oxy-fuel flames and can be viewed as an extension of conventional data evaluation strategies. These post-processing schemes presume the knowledge of the chemical performance of the system investigated, whereas in this study chemical equilibrium is used exemplarily. The focus is on single-shot measurement important for the investigation of turbulent flows. Experimental procedures using a KrF * excimer laser at 248.4 nm are scrutinized, and the measurement of the Rayleigh cross-section of OH at 248.4 nm necessary for data evaluation is presented.