“…Numerous methods to synthesize metal thin films are known such as atmospheric pressure chemical vapor deposition (CVD) [1,2,6,9], plasmaenhanced CVD [10], magnetron sputtering [11,12], reactive sputtering [13,14], and reactive radio frequency (RF) sputtering [3,5,15,16]. Among them, reactive RF magnetron sputtering is commonly used to obtain uniform thin films.…”