2003
DOI: 10.1007/s11664-003-0220-1
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Optical response of tin nitride thin films prepared by halide chemical vapor deposition under atmospheric pressure

Abstract: Optical response of tin nitride (SnN x ) films, which were deposited onto quartz substrates by means of atmospheric pressure, halide chemical vapor deposition (AP-HCVD), were examined by pulsed irradiation of a YAG laser (532 nm). It was observed that the transmittance of a light of a He-Ne laser (633 nm) through the SnN x film decreases after the film is irradiated with a YAG laser. The atomic force microscopy (AFM) micrograph observation confirmed that spot-like humps appeared on the SnN x film surface in th… Show more

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Cited by 9 publications
(3 citation statements)
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“…9 At around the same time as Maya's bulk synthesis, Gordon et al produced crystalline Sn 3 N 4 thin lms by chemical vapour deposition (CVD) from Sn(NMe 2 ) 4 and ammonia, 12 and various other thin lm preparation routes have been examined since. [13][14][15] Higher temperature synthesis was achieved by Shemkunas et al using a metathesis reaction between SnI 4 and Li 3 N at elevated pressure, 16 although washing with HCl (aq) was necessary to remove by-produced tin metal.…”
Section: Introductionmentioning
confidence: 99%
“…9 At around the same time as Maya's bulk synthesis, Gordon et al produced crystalline Sn 3 N 4 thin lms by chemical vapour deposition (CVD) from Sn(NMe 2 ) 4 and ammonia, 12 and various other thin lm preparation routes have been examined since. [13][14][15] Higher temperature synthesis was achieved by Shemkunas et al using a metathesis reaction between SnI 4 and Li 3 N at elevated pressure, 16 although washing with HCl (aq) was necessary to remove by-produced tin metal.…”
Section: Introductionmentioning
confidence: 99%
“…Numerous methods to synthesize metal thin films are known such as atmospheric pressure chemical vapor deposition (CVD) [1,2,6,9], plasmaenhanced CVD [10], magnetron sputtering [11,12], reactive sputtering [13,14], and reactive radio frequency (RF) sputtering [3,5,15,16]. Among them, reactive RF magnetron sputtering is commonly used to obtain uniform thin films.…”
Section: Introductionmentioning
confidence: 99%
“…[8] Thespinel crystal structure was then determined by Scotti in 1999 at ambient conditions. [9] Preparation by high pressure metathesis reactions, [10] au rea-gel route, [11] and various thinfilm methods [12][13][14][15] have also been described. Sn 3 N 4 has atunable band gap,and is composed of only Earth-abundant elements,i dentifying it as af avourable candidate for optoelectronic technologies.…”
mentioning
confidence: 99%