Silicene is one of
the most promising two-dimensional (2D) materials
for the realization of next-generation electronic devices, owing to
its high carrier mobility and band gap tunability. To fully control
its electronic properties, an external electric field needs to be
applied perpendicularly to the 2D lattice, thus requiring the deposition
of an insulating layer that directly interfaces silicene, without
perturbing its bidimensional nature. A promising material candidate
is CaF2, which is known to form a quasi van der Waals interface
with 2D materials as well as to maintain its insulating properties
even at ultrathin scales. Here we investigate the epitaxial growth
of thin CaF2 layers on different silicene phases by means
of molecular beam epitaxy. Through electron diffraction images, we
clearly show that CaF2 can be grown epitaxially on silicene
even at low temperatures, with its domains fully aligned to the lattice
of the underlying 2D structure. Moreover, in situ X-ray photoelectron
spectroscopy data evidence that, upon CaF2 deposition,
no changes in the chemical state of the silicon atoms can be detected,
proving that no Si–Ca or Si–F bonds are formed. This
clearly shows that the 2D layer is pristinely preserved underneath
the insulating layer. Polarized Raman experiments show that silicene
undergoes a structural change upon interaction with CaF2; however, it retains its two-dimensional character without transitioning
to a sp3-hybridized silicon. For the first time, we have
shown that CaF2 and silicene can be successfully interfaced,
paving the way for the integration of silicon-based 2D materials in
functional devices.