“…These three impurities provide not only isolated substitutional defects (i.e., oxygen and carbon substituting nitrogen, and silicon substituting aluminum: O N, C N, Si Al ), [17][18][19][20][21][22] but are also assumed to form complexes, such as V Al -nSi Al , 23 V Al -nO N (n=1…4 is a number of Si or O atoms), 13,14,16,[23][24][25][26][27][28] C N -Si Al , 29 carbon pairs, 30 and tri-carbon complexes. 31 Usually, defects can have several allowed charge states in the bandgap, 32,33 including DXstates, [34][35][36][37][38] resulting in the polymorphism of defects properties. The current charge states of defects are given by the Fermi level which should be known first for a successful characterization of AlN crystals.…”