2009
DOI: 10.1088/0960-1317/19/5/055017
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Optical-softlithographic technology for patterning on curved surfaces

Abstract: We have established a novel concept of hybrid lithographic technology for non-planar surface patterning. Softlithography and photolithography are properly combined to transfer micro-patterns onto a curved area in an easy, low-cost way. As a first step, a film type of a photomask with micro-metal features is fabricated by the direct pattern transfer technique that has been presented in our preliminary work. Then, a flexible polymer photomask is wrapped on a curved surface to make conformal contact, and a variet… Show more

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Cited by 58 publications
(31 citation statements)
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“…Traditional techniques for patterning surfaces with spatial wettability contrast include vapor deposition (8), photolithography (3), and soft lithography (54,55). Although photolithography can only be used to pattern flat substrates, soft lithography using flexible molds or masks fabricated via photolithography can work on cylindrical or conical surfaces, i.e., curved surfaces with zero Gaussian curvature (54,55).…”
Section: Resultsmentioning
confidence: 99%
“…Traditional techniques for patterning surfaces with spatial wettability contrast include vapor deposition (8), photolithography (3), and soft lithography (54,55). Although photolithography can only be used to pattern flat substrates, soft lithography using flexible molds or masks fabricated via photolithography can work on cylindrical or conical surfaces, i.e., curved surfaces with zero Gaussian curvature (54,55).…”
Section: Resultsmentioning
confidence: 99%
“…In addition, the soft lithography technology was used to realize patterning on the curved surface in Ref. [12]. Even, in order to fabricate microstructures on the thin cylindrical substrate, an automatic wire bonder was also utilized in the work [13,14].…”
Section: Flexible Implantable Microtemperature Sensormentioning
confidence: 99%
“…Complex antenna arrays with non-planar geometries have been implemented in the past using multiple layers or tiling schemes which may involve intricate and time-consuming assembly steps [130]. Some designs based on canonical geometries have utilized directive deposition through shadow masks [131] or flexible contact masks [132] to mitigate defects such as folding, stretching and cracking that can result from a post-processing step [133]. Masks, however, have been implemented successfully only in single curved surfaces such as cylinders with an added restriction of patterning smooth elements.…”
Section: Conformal Structuresmentioning
confidence: 99%